NUEE Department of Electrical Engineering, Electronics,and Information Engineering,School of Engineering, Nagoya University Department of Electrical Engineering,Department of Electronics, and Department of Information and Communication Engineering,Graduate School of Engineering,Nagoya University

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Experimental Facilities

Experimental Facilities

Among various experimental facilities available on campus, we highlight some of the most notable ones in our departments.

Magnetron sputtering system equipped with plasma monitoring devices
Clean Room
In the clean room, sputtering and vacuum evaporation systems for depositing magnetic thin films, photolithography tools and ion etching systems for microfabrication are installed.
AC High-Current Generation System
This system can generate a high alternating current of 10 kA at 60 Hz, and is the most advanced facility among Japanese universities.

■Others

High-Performance Ultra-High Voltage Electron Microscope
High Voltage Electron Microscope Laboratory
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Department of Electrical Engineering, Electronics, and Information Engineering, School of Engineering, Nagoya University.
Furo-cho, Chikusa-ku, Nagoya 464-8603 JAPAN

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