Specifications
[Scanning Electron Microscope]
JEOL JSM-6301FS
Acceleration voltage: 0.5 - 30 kV
Emitter: W field emittion gun
Beam diameter: 1.5 nm (at 15 kV), 5.0 nm (at 1 kV)[Energy Dispersive Spectroscope, EDS]
JEOL JED-2300 (Mini Cup EDS)
Detectable species: Na - U
Energy resolution: < 144 eV
