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EE-mail: miyazaki@***
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- S. Miyazaki and K. Makihara, gFormation and Characterization of Fe-Silicide Nanodots for Optoelectronic Applicationh,
ECS Trans., 112 (1) pp. 131-137 (2023) (Invited).
- K. Makihara, Y. Yamamoto, Y. Imai, N. Taoka, M. A. Schubert, B. Tillack, and S. Miyazaki, gRoom Temperature Light Emission from Superatom-like Ge-core/Si-shell Quantum Dotsh, Nanomaterials, 13(9), 1475/8pages (2023).
- Y. Imai, R. Tsuji, K Makihara, N. Taoka, A. Ohta, and S. Miyazaki, gAlignment control of self-assembling Si quantum dotsh, Materials Science in Semiconductor Processing 162, 107526/4pages (2023).
- S. Nishimura, N. Taoka, A. Ohta, K. Makihara, and S. Miyazaki, gFormation of Ultra-thin NiGe Film with Single Crystalline Phase and Smooth Surfaceh, Jpn. J. Appl. Phys. 62, SC1027/6pages (2022).
- H. Furuhata, K. Makihara, Y. Shimura, S. Fujimori, Y. Imai, A. Ohta, N. Taoka, and S. Miyazaki, "Study on Silicidation Reaction of Fe-NDs with SiH4", Applied Physics Express 15, 055503/4pages (2022).
- S. Miyazaki, Y. Imai, and K. Makihara, gCharacterization of Light Emission Properties of Impurity Doped Ge/Si Core-Shell Quantum Dotsh, ECS Trans. 109, pp. 335-341 (2022) (Invited).
- J. Yuhara, H. Muto, M. Araidai, M. Kobayashi, A. Ohta, S. Miyazaki, S. Takakura, M. Nakatake, and G. L. Lay, gSingle germanene phase formed by segregation through Al(111) thin films on Ge(111),h 2D Materials, 8(4), 045039/10pages (2021).
- A. Ohta, K. Yamada, H. Sugawa, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki, gSurface flattening and Ge crystalline segregation of Ag/Ge structure by thermal annealh, Jpn. J. Appl. Phys. 60, SBBK05/6pages (2021).
- A. Ohta, T. Imagawa, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki,gEnergy band diagram for SiO2/Si system as evaluated from UPS analysis under vacuum ultraviolet with variable incident photon energyh, Jpn. J. Appl. Phys. 60, SA, SAAC02/6pages (2020).
- M. Kobayashi, A. Ohta, M. Kurosawa, M. Araidai, N. Taoka, T. Simizu, M. Ikeda, K. Makihara, and S. Miyazaki,gFormation of ultrathin segregated-Ge crystal on Al/Ge(111) surfaceh, Jpn. J. Appl. Phys. 59, SGGK15/6pages (2020).
- S. Miyazaki, and A. Ohta, "Photoemission-based Characterization of Gate Dielectrics and Stack Interfaces", ECS Trans., 92 (4) 11-19 (2019) (Invited).
- S. Fujimori, R. Nagai, M. Ikeda, K. Makihara and S. Miyazaki, "Effect of H2-dilution in Si-cap formation on photoluminescence intensity of Si quantum dots with Ge core", Jpn. J. Appl. Phys., 58, SIIA01/4pages (2019).
- N. X. Truyen, N. Taoka, A. Ohta, K. Makihara, H. Yamada, T. Takahashi, M. Ikeda, M. Shimizu and S. Miyazaki, "Interface properties of SiO2/GaN structures formed by chemical vapor deposition with remote oxygen plasma mixed with Ar or He", Jpn. J. Appl. Phys., 57, 06KA01/7pages (2018).
- K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki, "Segregated SiGe ultrathin layer formation and surface planarization on epitaxial Ag(111) by annealing of Ag/SiGe(111) with different Ge/(Si+Ge) compositions", Jpn. J. of Appl. Phys., 57, 04FJ05/6pages (2018).
- K. Makihara, M. Ikeda, N. Fujimura, K. Yamada, A. Ohta, and S. Miyazaki, "Electroluminescence of superatom-like Ge-core/Si-shell quantum dots by alternate field-effect-induced carrier injection", Appl. Phys. Express, 11, 011305/4pages (2018).
- S. Miyazaki, N. X. Truyen, A. Ohta and T. Yamamoto, "Photoemission Study of Gate dielectrics on Gallim Nitride", ECS Trans., 79(1), pp. 119-127 (2017) (Invited).
- D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, S. Miyazaki, "Impact of Phosphorus Doping to Multiple-Stacked Si Quantum Dots on Electron Emission Properties", Materials Science in Semiconductor Processing, 70, pp. 183-187 (2017).
- N. Fujimura, A. Ohta, M. Ikeda, K. Makihara, S. Miyazaki, "Photoemission Study on Electrical Dipole at SiO2/Si and HfO2/SiO2 Interfaces", Jpn. J. Appl. Phys., 56, No.4S, 04CB04/6pages (2017).
- S. Miyazaki, K. Makihara, A. Ohta, and M. Ikeda, gProcessing and Characterization of Si/Ge Quantum Dotsh, Technical Digest of Int. Electron Devices Meeting 2016, pp. 826-830 (2016) (Invited).
- H. Zhang, K. Makihara, A. Ohta, M. Ikeda and S. Miyazaki, "Formation and characterization of high-density FeSi nanodots on SiO2 induced by remote H2 plasma", Jpn, J. Appl. Phys., 55, 01AE20/4pages (2016).
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- S. Miyazaki, and K. Makihara, gFormation and Characterization of Fe-Silicide Nanodots for Optoelectronic Applicationh, Semiconductor Process Integration 13, Symp. G02 in The 244th Electrochemical Society (ECS) Meeting (Gothenburg, Sweden, Oct. 8-12, 2023) G02-1542.
- S. Miyazaki,gFormation and Characterization of Impurity-Doped Ge/Si Core-Shell Quantum Dotsh, THERMECf2023-Int. Conf. on Processing & Manufacturing of Advanced Materials (Viena, Austria, July 3-7, 2023) Session: J8 Interfaces, GB, IGBE 2.
- S. Miyazaki, K. Makihara, and Y. Imai, gFormation and luminescence studies of Ge/Si core-shell quantum dotsh, 2023 Intern. Conf. on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs TFT 8) (Otaru, May 14-18, 2023) Session: Semiconductor Materials.
- S. Miyazaki, Y. Imai, and K. Makihara, "Characterization of Light Emission Properties of Impurity Doped Ge/Si Core-Shell Quantum Dots", Symp. G03 in The 242nd Electrochemical Society (ECS) Meeting (On-demand, Atranta, Oct. 9-13, 2022) G03-1234.
- S. Miyazaki,gPhotoemission-based Characterization of Interface Dipoles and Defect States for Gate Dielectricsh, 11th International Conference on Processing and Manufacturing of Advanced Materials (Thermec'2020/2021), (On-demand, June 1-5, 2021) F1 June01-15.
- S. Miyazaki,gFabrication and Characterization of Multiple Stack Si/Ge Quantum Dots for Light/Electron Emission Devicesh, The 13th International Conference and Expo on Nanotechnology & Nanomaterials (iNanotech 2021) (On-line, July 12-13, 2021) DAY2-Planary Session 5.
- S. Miyazaki, and K. Makihara, gImpact of Boron Doping and H2 Annealing on Light Emission from Ge/Si Core-Shell Quantum Dotsh, Semiconductor Process Integration 12, Symp. G02 in The 240th Electrochemical Society (ECS) Meeting (On-line, Oct. 10-14, 2021) G02-0924.
- S. Miyazaki, gPhotoemission-based Characterization of Interface Dipoles and Defect States for Gate Dielectricsh, 11th International Conference on Processing and Manufacturing of Advanced Materials (THERMEC'2020/2021), Virtual Conference (On-demand: From June 1 for 6 months) F1 June01-15.
- S. Miyazaki, and A. Ohta, gPhotoemission Study of Chemically-Cleaned GaN Surfaces and GaN-SiO2 Interfaces Formed by Remote Plasma CVDh, Material Research Meeting 2019 (MRM 2019) (Yokohama, Dec. 10-14, 2019) D-4-12-I06.
- S. Miyazaki, gFabrication and Characterization of Multiple Stack Si/Ge Quantum Dots for Light Emissionh, 3rd Int. Conf. on Photonic Research: InterPhotonics 2019 (Antalya, Turkey, Nov. 4-9, 2019) phoenix 2 Mon-PM-6.
- S. Miyazaki, gStudy on Light Emission from Multiple Stack Si/Ge Quantum Dotsh, World Congress on Lasers, Optics and Photonics (Barcelona, Spain, Sept. 23-25, 2019) Session: Diamond based Photonics and Silicon Photonics.
- S. Miyazaki, gFabrication and Characterization of Multiple Stack Si/Ge Quantum Dots for Light and Electron Emissionsh, World Chemistry Forum 2019 (WCF-2019) (Barcelona, Spain, May 22-24, 2019) Forum 2-7: Nano-Fabrication, Characterization and Nanoengineering, p.145.
- S. Miyazaki, and A. Ohta, gPhotoemission Characterization of Interface Dipoles and Electronic Defect States for Gate Dielectricsh, ULSIC vs TFT: The 7th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs TFT 7) (Kyoto, May 19 to 23, 2019), Device Physics I-2.
- S. Miyazaki, gLight Emission from Multiple Stack Si/Ge Quantum Dotsh, 7th Global Nanotechnology Congress and Expo: Nanotechnology 2019 (Kuala Lumpur, Malaysia, Dec. 2-4, 2019) Session: Qunatum Dots.
- S. Miyazaki, and A. Ohta, gPhotoemission Study of Gate Dielectrics and Stack Interfacesh, 2018 International Conference of Solid State of Device and Materials (SSDM 2018) (Tokyo, September 19-23, 2018) E-3-01.
- S. Miyazaki, K. Makihara, M. Ikeda, and A. Ohta, gFormation and Characterization of Si/Ge Quantum Dots for Optoelectronic Applicationh, International Conference on Processing & Manufacturing of Advanced Materials (Thermec'2018) (Paris, France, July 9-13, 2018) H6-5.
- [Plenary] S. Miyazaki, gChallenges in Si-Based Nanotechnology:Fabrication and Characterization of Multistack Si/Ge Quantum Dots for Novel Functional Devicesh, The 5th International Conference on Advanced Materials Science and Technology 2017 (ICAMST 2017) (Makassar, Indonesia, Sept. 19-20, 2017) P-001.
- S. Miyazaki, K. Yamada, Y. Nakashima, K. Makihara, A. Ohta, and M. Ikeda, gFabrication of Multiple Stack Si/Ge Quantum Dots for Light/Electron Emission Devicesh, The 1st International Semiconductor Conference for Global Challenges (ISCGS-2017)@(Nanjing, China, July 17-19, 2017) Session 1-2.
- S. Miyazaki, K. Yamada, M. Ikeda, and K. Makihara, gStudy of Light Emission from Si Quantum Dots with Ge Coreh, Frontiers in Materials Processing Applications, Research and Technology (FiMPART'17) (Bordeaux, France, July 9-12, 2017) D2 OP1998.
- S. Miyazaki, A. Ohta, and N. Fujimura, gCharacterization of Interfacial Dipoles at Dielectric Stacks by XPS Analysish, The 232nd Electrochemical Society (ECS) Meeing (National Harbor MD, Oct. 1-5, 2017) D01-841.
- S. Miyazaki, K. Yamada, K. Makihara, and M. Ikeda, gProcessing and Characterization of High Density Si/Ge Quantum Dots for Electroluminescent Devicesh, The 232nd Electrochemical Society (ECS) Meeting (National Harbor MD, Oct. 1-5, 2017) G03-1128.
- S. Miyazaki, N. Truyen, and A. Ohta, gPhotoemission Study of Gate Dielectrics on Gallim Nitrideh, The 6th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs TFT 6)(Schloss Hernstein, Hernstein, Austria, May 21-25, 2017) Session 2D & Novel devices.
- [Plenary] S. Miyazaki, gHigh Density Formation of and Light Emission from Silicon Quantum Dots with Ge Coreh,11th Workshop on Si-based Optoelectronic Materials and Devices (Nanjing, China, June 16-19, 2016) Plenary 1.
- S. Miyazaki, K. Makihara, A. Ohta, and M. Ikeda, gProcessing and Characterization of Si/Ge Quantum Dotsh, Internatinal Electron Devices Meeting 2016 (IEDM 2016) (San Francisco CA, Dec. 3-7, 2016) Session 33.2, pp. 826-830.
- S. Miyazaki, D. Takeuchi, M. Ikeda, and K. Makihara, gFormation and Characterization of Si Quantum Dots with Ge Core for Functional Devicesh, 2016 International Conference on Solid State Devices and Materials (SSDM 2016) (Tsukuba, Sep. 27-29, 2016), D-5-01.
- S. Miyazaki, gCharacterization of Light Emission from Si Quantum Dots with Ge Coreh, Intern. Conf. on Processing and Manufacturing of Advanced Materials 2016 (THERMEC'2016) (Granz, Austria, May 29-June 3, 2016) H2-2.
- S. Miyazaki, gMagnetoelectronic Transport and Resistive Switching in Double Stack FePt Nanodots on Ultrathin SiO2/c-Sih, JSPS Core-to-Core Program Workshop "Atomically Controlled Processing for Ultralarge Scale Integration", (Julich, Germany, November 24-26, 2016) S4.3.
- S. Miyazaki, "High Density Formation and Light Emission Properties of Silicon Quantum Dots with Ge Core",The 2nd Annual World Congress of Smart Materials-2016, (Singapore, March 4-6, 2016) Focus 101-13.
- S. Miyazaki, gHigh-Resolution Photoemission Study of High-k Dielectric Bilayer Stack on Ge(100)h, The 228th Electrochemical Society (ECS) Meeting (Phenix, USA, Oct. 11-15, 2015) G04-1090.
- S. Miyazaki, gHigh Density Formation and Characterization of CoPt and FePt Nanodots on SiO2h, International Conference on Frontiers in Materials Processing Applications Research & Technology (FiMPART'15), (Hyderabad, India, June 12-15, 2015) C1.6.
- S. Miyazaki, gStudy on Light Emission from Si Quantum Dots with Ge Coreh, The 9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9) (Montreal, May 18-22, 2015) S2.3-1.
- [Plenary] S. Miyazaki, gMaterials and Interfaces Characterization for Advanced Ge-Channel Devices: Soft and Hard X-ray Photoemission Measurementsh, The 1st Material Research Society of Indonesia (MRS-Id) Meeting (Bali, Indonesia, Sept. 26-28, 2014) Plenary 5.
- S. Miyazaki, and A Ohta, gPhotoemission Study of High-k Dielectrics Stack on Ge(100) - Determination of Energy Bandgaps and Band Alignmentsh, JSPS Core-to-Core Program Workshop "Atomically Controlled Processing for Ultralarge Scale Integration" (Leuven, Belgium, Nov. 12-13, 2014) 2.1.
- S. Miyazaki, and A. Ohta, gXPS study of Energy Band Alignment of High-k Dielectric Gate Stack on Geh, 2014 MRS Spring Meetings, (Boston MA, April 21-25, 2014) BB 8.05.
- S. Miyazaki, gOptoelectronic Response of Metal-Semiconductor Hybrid Nanodots Floating Gateh, 2013 Energy Materials Nanotechnology Fall Meeting (EMN2013) (Orlando FL, Dec. 7-10, 2013) A62.
- S. Miyazaki, gFormation and Characterization of Hybrid Nanodots Embedded in Gate Dielectric for Optoelectronic Applicationh, International Conference on Processing and Manufacturing of Advanced Materials 2013 (THERMEC'2013) (Las Vegas NV, Dec. 2-6, 2013) Session L2-3, 817
- S. Miyazaki, gStudy on Charge Storage and Optical Response of Hybrid Nanodots Floating Gate Mos Devices for Their Optoelectronic Applicationh, The 224th Electrochemical Society (ECS) Meeting (San Francisco CA, Oct. 27-Nov. 1, 2013) E12-2235
- S. Miyazaki, K. Makihara, and M. Ikeda, gFormation and Characterization of Hybrid Nanodots Floating Gate for Optoelectronic Devicesh, JSPS Core-to Core Program Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" (Albany NW, June 8, 2012) Session 4-1.
- S. Miyazaki, gFormation of Metal-Semiconductor Hybrid Nanodots and Its Application to Functional Floating Gateh, BIT's 1st Annual World Congress of Nano-S&T-2011 (Dairen, China, Oct.23-26, 2011) Track 2-3, p.256.
- S. Miyazaki, gFormation and Characterization of Silicon-Quantum-Dots/Metal-Silicide- Nanodots Hybrid Stack and its Application to Floating Gate Functional Devicesh, The 220th Electrochemical Society (ECS) Meeting, (Boston, MA, Oct. 9-14, 2011) E9-2157.
- S. Miyazaki, gFormation of Hybrid Nanodots Floating Gate for Functional Memoriesh, International Conference on Processing & Manufactturing of Advanced Materials (Themecf2011) (Quebec, Canada, Aug. 1-5, 2011) NANO-1-7.
- [Keynote]S. Miyazaki, gCharacterization of La- and Mg-Diffused HfO2/SiO2 Stack Structures of for Next Generation Gate Dielectricsh, 7th Pacific Rim International Conference on Advanced Materials and Processing (PRICM7) (Cairns, Australia, Aug. 2-6, 2011) Symp. G.
- S. Miyazaki, gApplication of Remote Hydrogen Plasma to Selective Processing for Ge-based Devices -Crystallization, Etching and Metallizationh, The 4th International Conference on Plasma-Nano Technology & Science (IC-PLANTS 2011) (Takayama, March 10-12, 2011) I-05.
- S. Miyazaki, gFabrication and Characterization of Hybrid Nanodots for Floating Gate Applicationh, International Conference on Solid-State and Integrated Circuit Technology (ICSICT), (Shanghai, China, Nov. 1- 4, 2010) I07_10.
- S. Miyazaki, N. Morisawa, S. Nakanishi, K. Makihara, and M. Ikeda, gFormation of Hybrid Nanodots Floating Gate for Functional Memories -Charge Strage Characteristics and Optical Response-h, The 5th International Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2010) (Sendai, Jan. 29-30, 2010) I-17, pp. 77-78.
- S. Miyazaki, M. Ikeda, K. Makihara, K. Shimanoe, and R. Matsumoto, gFormation of Metallic Nanodots on Ultrathin Gate Oxide Induced by H2-plasma Treatment and Its Application to Floating Gate Memoriesh, The 4th International Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2008) (Sendai, Sep. 25-27, 2008) Z-01, pp. 53-54.
- S. Miyazaki, gFormation of Si Quantum Dots/Silicide Nanodots Stack Structure and Its Memory Applicationh, The 1st International Workshop on Si based nano-electronics and photonics (SiNEP-09) (Vigo, Spain, Sept. 20-23, 2009) SESSION 4, pp. 79-80.
- S. Miyazaki, M. Ikeda, K. Makihara, K. Shimanoe, and R. Matsumoto, gFormation of High Density Metal Silicide Nanodots on Ultrathin SiO2 for Floating Gate Memory Applicationh, International Conference on Processing and Manufacturing of Advanced Materials, Pricessing, Fabrication, Proreties, Applications (THERMECf2009) (Berlin, Germany, Augst 25-29) SESSION E5, p. 115.
- S. Miyazaki, M. Ikeda, K. Makihara, K. Shimanoe, R. Matsumoto, and N. Morisawa, gFabrication of Metal Silicide Nanodots and Hybrid Stacked Structure in Combination with Silicon Quantum Dots for Floating Gate Applicationh, The 3rd Asian Physucs Symposium (APS 2009) (Bandung, Indonesia, July 22-23, 2009) IN03, pp. 13- 17.
- S. Miyazaki, K. Makihara, and M. Ikeda, gFormation and Characterization of Hybrid Nanodot Stack Structure for Floating Gate Applicationh, The 6th International Conference on Silicon Epitaxiy and Heterostructures (ICSI-6) (Los Angeles, CA, May 17-22, 2009) Session 2A.
- S. Miyazaki, M. Ikeda, K. Makihara, K. Shimanoe, and R. Matsumoto, gPlasma-enhanced Self-assembling Formation of Metallic Nanodots on Ultrathin SiO2 for Floating Gate Applicationh, International Union Material Research Society (IUMRS) - International Conference in Asia (Nagoya, Dec. 9-13, 2008) QI-8, p. 131.
- S. Miyazaki, M. Ikeda, K. Makihara, K. Shimanoe, and R. Matsumoto, gFormation of metal and silicide nanodots on ultathin gate oxide induced by H2-plasmah, The 17th World Interfinish Congress & Exposition with the 9th International Conference on Advanced Surface Engineerring (9th ICASE) (Busan, Korea, June 16-19, 2008) IN-07.
- S. Miyazaki, H. Yoshinaga, A. Ohta, Y. Akasaka, K. Shiraishi, K. Yamada, S. Inumiya, M. Kadoshima, and Y. Nara, gPhotoemission Study of Metal/HfSiON Gate Stackh, The 213th Electrochemical Society (ECS) Meeting (Phoenix AZ, May, 18-22, 2008) E3-703.
- S. Miyazaki, H. Yoshinaga, A. Ohta, Y. Akasaka, K. Shiraishi, K. Yamada, S. Inumiya, M. Kadoshima, and Y. Nara, gPhotoemission Study of Metal/High-k Dielectric Gate Stackh, The 38th IEEE Semiconductor Interface Specialists Conference (SISC) (Arlington VA, Dec. 6-8, 2007) 3.1.
- S. Miyazaki, M. Ikeda, K. Makihara, gElectron Charging and Discharging Characteristics of Si-Based Quantum Dots and Their Application of Floating Gate MOS Memoriesh, The 3rd International Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2007) (Sendai, Nov. 8-9, 2007) I-16, pp. 73-74.
- S. Miyazaki, gSelf-Assembling Formation of Si-Based Quantum Dots and Control of Their Electronic Charged States for Multivalued MOS Memoriesh, The 10th International Conference on Advanced Materials | International Union of Materials Research Societies, (Bangalore, India, Oct. 8-13, 2007) V-Inv-08, pp. V-5-V-6.
- S. Miyazaki, M. Ikeda, and K. Makihara, gCharacterization of Electoronic Charged States of Si-Based Quantum Dots for Floating Gate Applicationh, The 212th Electrochemical Society (ECS) Meeting (Washington DC, Oct. 7-12, 2007) E9-1276.
- S. Miyazaki, M. Ikeda, and K. Makihara, gCharacterization of Electronic Charged States of Si-Based Quantum Dots and Their Application to Floating Gate Memoriesh, The 5th International Conference on Silicon Epitaxy and Heterostructures (ICSI-5) (Marseille, France, May 20-25, 2007) S2-I17, pp. 87-88.
- S. Miyazaki, A. Ohta, Pei, S, Inumiya, Y. Nara and K. Yamada, gDepth Profiling of Chemical and Electronic Structures and Defects of Ultrathin HfSiON on Si(100)h, The 210th Electrochemical Society (ECS) Meeting (Cancun, Mexico, Oct. 29-Nov. 3, 2006) E4-1104.
- S. Miyazaki, K. Makihara, and M. Ikeda, gCharacterization of Electronic Charged States of Si-based Quantum Dots for Multi-valued MOS Memoriesh, The 8th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT), (Shanghai, China, Oct. 23-26, 2006) C3.14, pp. 736-739.
- S. Miyazaki, K. Makihara, and M. Ikeda, gControl of Electronic Charged States of Si-based Quantum Dots for Floating Gate Applicationh, The 2nd International Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2006) (Sendai, Oct. 2-3, 2006) I-10, pp. 49-50.
- S. Miyazaki, A. Ohta, S. Inumiya, and Y. Nara, gInfluences of Nitrogen Incorporation on Electronic Structure and Electrical Properties of Ultrathin Hafnium Silicateh, The European Materials Research Society (E-MRS) 2006 Spring Meeting (Nice, France, May 29 to June 2, 2006) L-4a.
- S. Miyazaki, M. Ikeda, and K. Makihara, gCharacterization of Electronic Charged States of Si-Based Quantum Dots and Their Application to Floating Gate Memoriesh, The 209th Electrochemical Society (ECS) Meeting, (Denver CO, May 7-12, 2006) I1-390.
- S. Miyazaki, gControl of Discrete Charged States in Si-Based Quantum Dots and Its Application to Floating Gate Memoriesh, The 4th International Symposium Surface Science and Nanotechnology (ISSS-4), (Omiya, Nov. 14 - 17, 2005) Th-A6(I), p. 540.
- S. Miyazaki, gSelf-Assembling Formation of Si-based Quantum Dots and Control of Their Electric Charged States for Multi-valued Memoriesh, SPIE Conference on Nanofabrication: Technologies, Devices, and Applications II (SA111) at Optics East (Boston MA, Oct.23-26, 2005) No. OE05-SA111-41.
- S. Miyazaki, gElectron Charging and Discharging Characteristics of Si-based Quantum Dots Floating Gateh, The Second International Symposium on Point Defects and Nonstoichiometry (ISPN-2) (Kaohsiung, Taiwan, Oct 3-5, 2005) Th-A1-1, p. 19.
- S. Miyazaki, gControl of Charged States of Silicon-Based Quantum Dots and Its Application to Floating Gate MOS Memoriesh, First International Workshop on New Group IV Semiconductor Nanoelectronics (SiGe(C)2005) (Sendai, May 27-28, 2005) V-2, pp. 39-40.
- S. Miyazaki, gHigh Rate Growth of Crystalline Si and Ge Films from Inductively-Coupled Plasmah, SREN 2005 International Conference on Solar Renewable Energy News, Low Energy Buildings, Research of Historical Artifacts (Florence, Italy, April 2-8, 2005) Section 1-1.
- S. Miyazaki, gCharacterization of Charged States of Silicon-based Quantum Dots and Its Application to Floating Gate MOS Memoriesh, International Union of Materials Research Societies (IUMRS)-The 7th International Conference in Asia (ICA-7) (Hsinchu, Taiwan, Nov. 16-18, 2004) F-I-08, p. 208.
- S. Miyazaki, gElectrical Charging Characteristics of Silicon Dots Floating Gates in MOS Devicesh, The 7th China-Japan Symposium on Thin Films (Chengdu Sichuan, China, Sept. 20-22, 2004) 3, pp. 7-10.
- S. Miyazaki, gCharging/Discharging Characteristics of Silicon Quantum Dots and Their Application to Memory Devicesh, The 2004 Joint Conference of The 7th International Conference on Advanced Surface Enginnering (ASE2004) and The 2nd International Conference on Surface and Interface Science and Engineering (FSISE 2004) (Guangzhou, China, May 14-16, 2004) No. 270 p. 138.
- S. Miyazaki, gPhotoemission Study of High-k Gate Dielectric/Si(100) Heterostructures - Chemical Bonding Features and Energy Band Alignmenth, American Vacuum Society (AVS) 50th International Symposium and Exhibition (Baltimore MD, Nov. 3, 2003) DI-MoM7.
- S. Miyazaki, gSelf-Assembling of Si Quantum Dots and Their Application to Memory Devicesh, International Conference on Polycrystalline Semiconductors (Nara, Sept. 10-13, 2002) 105, p. 56.
- S. Miyazaki, gSelf-Assembling of Si quantum Dots and Their Application to Memory Devicesh, The 2nd Vacuum & Surface Sciences Conference of Asia and Australia (VASSCAA-2) (Hong Kong, Aug. 26-30, 2002) Mo7.
- S. Miyazaki, H. Takahashi, M. Sagara, and M. Hirose, gGrowth and Characterization of Amorphous and Microcrystalline Silicon-Germanium Filmsh, 2002 Material Research Society Spring Meeting (San Francisco CA, April 1-5, 2002) A18.1.
- S. Miyazaki, and H. Murakami, gCharacterization of Deposition Process of Microcrystalline Silicon-Germanium Films: In-situ Infrared Attenuated Total Reflection and Ex-situ Raman Scattering Studiesh, The 5th SANKEN International Symposium (Osaka, March 14, 2002) P1.13, pp. 65-66.
- S. Miyazaki, gCharacterization of Deposition Processes of Silicon-Germanium Films by Using In-Situ Infrared Attenuated-Total-Reflection and Surface-Sensitive Raman Scattering Spectroscopyh, Frontiers of Surface Engineering 2001: The 2001 Joint International Conference (Nagoya, Oct. 28 - Nov. 1, 2001) ID-01, p. 16.
- S. Miyazaki, gCharacterization of Ultrathin Gate Dielectrics on Silicon by Photoelectron Spectroscopyh, Int. Workshop on Device Technology - Alternatives on to SiO2 as Gate Dielectric for Future Si-Based Microelectronics (Porto Alegre, Brasil, Sept. 3-5, 2001) Tu5.
- S. Miyazaki, gElectronic Structures of High-k Gate Dielectricsh, Frontier Science Research Conference in Material Science & Technology Series: Sci. & Technol. of Silicon Materials (La Jolla CA, Aug. 13-15, 2001) Session I, Bulletin of the Stefan Univ. Vol.13.
- S. Miyazaki, gCharacterization of High-k Gate Dielectric/Silicon Interfacesh, The 8th Internatinal Conference on the Formation of Semiconductor Interfaces (Sapporo, June 10-15, 2001) Tu3-4, p. 190.
- S. Miyazaki, gPhotoemission Study of Energy Band Alignments and Gap State Density Distributions for High-k Gate Dielectricsh, The 28th Conference on the Physics and Chemistry of Semiconductor Interfaces (Lake Buena Vista FL, Jan. 7-11, 2001) We1620.
- S. Miyazaki, and M. Hirose, gPhotoemission Study of Energy Band Alignment and Gap State Density Distribution for High-k Gate Dielectricsh, Internernaional Conference on Characterization and Metrology for ULSI Technology (Gaithersburg MD, June 26-29, 2000) S2.2.
- S. Miyazaki, and M. Hirose, gInsights into Surface Reactions During Plasma-Enhanced CVD of a-Si1-xGe‚˜:H Films From FT-IR-ATR and Raman Scatteringh, The 11th Symposium of Material Research Society of Japan (MRS-J) (Kawasaki, Dec. 16-17, 1999) 2-8-K10.
- S. Miyazaki, T. Tamura, T. Murayama, A. Khono, and M. Hirose, gElectronic States of Hydrogen-Terminated Silicon Surfaces and SiO2/Si Interfacesh, JRCAT International Workshop on Science and Technology of Hydrogen-Terminated Silicon Surfaces (Tukuba, Nov. 4-6, 1997) Ses.6.3, pp. 35-36.
- S. Miyazaki, K. Shiba, K. Sakamoto, and M. Hirose, gPhotoluminescence Studies on Thermally-Oxidized Porous Siliconh, The 183rd Electrochemical Society (ECS) Meeting (Honolulu HI, May 16-21, 1993) No.146.
‘“àŠw‰ïE‰ï‡‚É‚¨‚¯‚鵑Òu‰‰y80Œz
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú± ½ˆê, ”––Œ•]‰¿–@|‘g¬Eó‘Ô•]‰¿, “ú–{ŠwpU‹»‰ï@R025æi”––ŒŠE–Ê‹@”\‘n¬ˆÏˆõ‰ï, ƒŠƒgƒŠ[ƒgŠwK‰ï, ƒnƒCƒuƒŠƒbƒh, “Œ‹ž, 2023”N7ŒŽ21`22“ú.
- ‹{ú± ½ˆêA‘å“c W¶, ≖Œ/GaN ŠE–ʂ̉»ŠwE“dŽqó‘Ô•]‰¿|Œõ“dŽq•ªŒõ•ªÍ‚©‚ç‚Ì’mŒ©, 2022”N ‘æ83‰ñ‰ž—p•¨—Šw‰ïH‹GŠwpu‰‰‰ï, “Œ–k‘åŠw, å‘ä, 2022”N9ŒŽ20“ú-23“ú, 21p-M206-5.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú± ½ˆê, ”––Œ•]‰¿–@|‘g¬Eó‘Ô•]‰¿, “ú–{ŠwpU‹»‰ï@R025æi”––ŒŠE–Ê‹@”\‘n¬ˆÏˆõ‰ï, ƒŠƒgƒŠ[ƒgŠwK‰ï, ƒIƒ“ƒ‰ƒCƒ“, 2022”N7ŒŽ29`30“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú± ½ˆê, ”––Œ•]‰¿–@|‘g¬Eó‘Ô•]‰¿, “ú–{ŠwpU‹»‰ï@R025æi”––ŒŠE–Ê‹@”\‘n¬ˆÏˆõ‰ï, ƒŠƒgƒŠ[ƒgŠwK‰ï, ƒIƒ“ƒ‰ƒCƒ“, 2021”N3ŒŽ5`6“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú± ½ˆê, ”––Œ•]‰¿–@|‘g¬Eó‘Ô•]‰¿, “ú–{ŠwpU‹»‰ï@”––Œ‘æ131ˆÏˆõ‰ï, ”––ŒHŠwƒZƒ~ƒi[2019, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2019”N7ŒŽ5`6“ú.
- ‹{ú± ½ˆê, “dŽqƒfƒoƒCƒXEÞ—¿ŠJ”‚ÉŒü‚¯‚½ƒiƒmƒXƒP[ƒ‹ƒXƒ^ƒbƒN\‘¢EŠE–ʂ̌õ“dŽq•ªŒõ•ªÍ, “dŽqƒfƒoƒCƒXŠE–ʃeƒNƒmƒƒW[Œ¤‹†‰ï\Þ—¿EƒvƒƒZƒXEƒfƒoƒCƒX“Á«‚Ì•¨—\i‘æ24‰ñj, “ŒƒŒŒ¤CƒZƒ“ƒ^[, 2019”N1ŒŽ24“ú-26“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú±½ˆê, ‘g¬Eó‘Ô•ªÍ, ”––ŒHŠwƒZƒ~ƒi[2018, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2018”N7ŒŽ20`21“ú.
- ‹{ú± ½ˆê, Si-GeƒX[ƒp[ƒAƒgƒ€\‘¢‚Ì‚–§“xWςƌõE“dŽq•¨«§Œä, ‘æ1‰ñuƒ|ƒXƒgƒOƒ‰ƒtƒFƒ“Þ—¿‚̃fƒoƒCƒXŠJ”Œ¤‹†‰ïv, ‰ÈŠw‹ZpŒð—¬à’c Œ¤‹†Œð—¬ƒZƒ“ƒ^[, 2018”N6ŒŽ11“ú.
- ‹{轈ê, Si-GeŒnƒRƒAEƒVƒFƒ‹—ÊŽq\‘¢‚Ì‚–§“xWςƌõE“dŽq•¨«§Œä, ‘æ65‰ñ‰ž—p•¨—Šw‰ït‹GŠwpu‰‰‰ï, ‘ˆî“c‘åŠw@¼‘ˆî“cƒLƒƒƒ“ƒpƒX, 2018”N3ŒŽ17 `20“ú, 18p-C304-3.
- ‹{轈ê, GaN|MOSƒfƒoƒCƒXŠJ”‚ÉŒü‚¯‚½ƒQ[ƒg≖Œ‹y‚ÑŠE–ʂ̌õ“dŽq•ªŒõ, æiƒpƒ[”¼“±‘Ì•ª‰È‰ï ‘æ4‰ñu‰‰‰ï, –¼ŒÃ‰®‘Û‰ï‹cê, 2017”N11ŒŽ1`2“ú, OIV-1.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú±½ˆê, ‘g¬Eó‘Ô•ªÍ, ”––ŒHŠwƒZƒ~ƒi[2017, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2017”N7ŒŽ28`29“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú±½ˆê, ‘g¬Eó‘Ô•ªÍ , ”––ŒHŠwƒZƒ~ƒi[2016, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2016”N6ŒŽ3`4“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, XüŒõ“dŽq•ª‚É‚æ‚é”––Œ‚¨‚ÑŠE–Ê•]‰¿, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ5‰ñ Šî‘buÀuÅæ’[”––Œ•]‰¿‹Zp|”¼“±‘̂Ɠd‹C‰»Šw‚ðŒ‹‚Ô•\–ÊEŠE–Ê•]‰¿‹Zp|v, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2015”N10ŒŽ3“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú±½ˆê, CVD 1iƒVƒŠƒRƒ“Œnj, ‘æ32‰ñ”––ŒƒXƒN[ƒ‹, ƒTƒ“ƒp[ƒNŒ¢ŽR, 2015”N7ŒŽ1`3“ú.
- [Šî’²u‰‰]‹{ú±½ˆê, ‹à‘®Šw‰ï ‘æ2‰ñƒGƒŒƒNƒgƒƒjƒNƒX”––ŒÞ—¿Œ¤‹†‰ï, –¼ŒÃ‰®‘åŠw, 2014”N9ŒŽ25“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú±½ˆê, CVD 1iƒVƒŠƒRƒ“Œnj, ‘æ31‰ñ”––ŒƒXƒN[ƒ‹, “Æ—§s–@l@ŽY‹Æ‹Zp‘‡Œ¤‹†Š@•Ÿ“‡Ä¶‰Â”\ƒGƒlƒ‹ƒM[Œ¤‹†Š, 2014”N7ŒŽ3`4“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{è ½ˆê, ”¼“±‘Ì\ƒƒ^ƒ‹@ÚGŠE–Ê‚Ì\‘¢‚ɂ‚¢‚Ä, ‘æ13‰ñ“ú–{•\–ʉȊw‰ï’†•”Žx•”Œ¤‹†‰ï, –¼ŒÃ‰®H‹Æ‘åŠw, 2013”N12ŒŽ21.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{ú±½ˆê, CVD 1iƒVƒŠƒRƒ“Œnj, ‘æ30‰ñ”––ŒƒXƒN[ƒ‹, ‚½‚ª‚í—´òŠt, ”\”üŽs, 2013”N7ŒŽ3`5“ú.
- ‹{轈ê, ƒiƒm\‘¢§Œä‚Å“WŠJ‚·‚é“dŽqƒfƒoƒCƒXŠJ”|‹@”\i‰»E‚“x‰»‚Ö‚Ì’§í, ”––ŒÞ—¿ƒfƒoƒCƒXŒ¤‹†‰ï, ‘æ9‰ñŒ¤‹†W‰ïu”––ŒƒfƒoƒCƒX‚Ì–¢—ˆv,‚È‚ç100”N‰ïŠÙ, “Þ—Ç, 2012”N11ŒŽ2 `3“ú, 2T01, pp.1-26.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, ‰»Šw‹C‘Ь’·–@, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ29‰ñ ”––ŒƒXƒN[ƒ‹, H•Û‰·ò¶Š¨, å‘ä, 2012”N7ŒŽ4“ú`6“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, ‰»Šw‹C‘Ь’·–@, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ28‰ñ ”––ŒƒXƒN[ƒ‹, ¼•—‰€, Š—ŒS, 2011”N7ŒŽ20“ú`22“ú.
- ‹{轈ê, ƒVƒŠƒRƒ“‹Zp, 30th Electronic Materials Symposium, ƒ‰ƒ“ƒvƒZƒbƒVƒ‡ƒ“uƒGƒŒƒNƒgƒƒjƒNƒX‚ðŽx‚¦‚é“dŽqÞ—¿@`‚Q‚O‚Q‚O”N‚Ö‚Ì“W–]`v, ƒ‰ƒtƒH[ƒŒ”ú”iŒÎ, 2011”N6ŒŽ29“ú`7ŒŽ1“ú.
- ‹{轈ê, High-k Gate ‹Zp‚ɂ‚¢‚Ä, TEL Advanced Technorogy Forrum 2010, “Œ‹žƒGƒŒƒNƒgƒƒ“Дޮ‰ïŽÐ ŽR—œŽ–‹ÆŠ, ŽR—œ, 2010”N8ŒŽ17“ú.
- ‹{轈ê, ƒAƒJƒfƒ~ƒbƒNƒ[ƒhƒ}ƒbƒv-ƒVƒŠƒRƒ“‹Zp, ƒZƒ~ƒRƒ“EƒWƒƒƒpƒ“2010, –‹’£ƒƒbƒZ, ‰¡•l, 2010”N12ŒŽ2“ú, ‰ž—p•¨—Šw‰ïƒAƒJƒfƒ~ƒbƒNƒ[ƒhƒ}ƒbƒv“Á݃Xƒe[ƒW.
- ‹{轈ê, ƒiƒm\‘¢§Œä‚̉ۑè, 2010”NH‹G ‘æ71‰ñ‰ž—p•¨—ŠwŠwpu‰‰‰ï, ’·è‘åŠw, ’·è, 2010”N9ŒŽ14“ú`17“ú), 16p-ZE-5uƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[‚Ì–¢—ˆ‘œ‚ð“O’ê“I‚Él‚¦‚é-Never Ending Silicon Technologyv.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, ‰»Šw‹C‘Ь’·–@, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ27‰ñ ”––ŒƒXƒN[ƒ‹, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2010”N7ŒŽ1`2“ú.
- ‹{轈ê, ƒvƒ‰ƒYƒ}‚É‚æ‚é”––ŒŒ`¬‹Zp, ‘æ20‰ñƒvƒ‰ƒYƒ}ƒGƒŒƒNƒgƒƒjƒNƒXuK‰ï, Œc‰ž‹`m‘åŠwi“ú‹gƒLƒƒƒ“ƒpƒX), ‰¡•l, 2009”N10ŒŽ29`30“ú, pp.37-47.
- ‹{轈ê, ’á’Y‘fŽÐ‰ï‚ÌŽÀŒ»‚ÉŒü‚¯‚½æ’[Šî”Õ‹Zp|‘¾—zŒõ”“d‚ð’†S‚Æ‚µ‚Ä|,@‘æ12‰ñuƒtƒŒƒbƒVƒ…—‰È‹³Žºv|Šy‚µ‚¢—‰ÈŽö‹Æ‚Ì‚½‚߂̋³ÞŒ¤Cƒ[ƒNƒVƒ‡ƒbƒv\, L“‡‘Û‘åŠwL“‡ƒLƒƒƒ“ƒpƒX‘Û‹³ˆçƒZƒ“ƒ^[, L“‡, 2009”N8ŒŽ11“ú, “Á•Êu‰‰, pp. 1- 9.
- ‹{轈ê, ƒƒ^ƒ‹/‚—U“d—¦â‰–ŒƒQ[ƒgƒXƒ^ƒbƒN‚É‚¨‚¯‚é“à•”“dˆÊ•]‰¿|ƒƒ^ƒ‹ƒQ[ƒgŽdŽ–ŠÖ”•ω»‚Ì‹NŒ¹, 2009”NH‹G ‘æ70‰ñ‰ž—p•¨—ŠwŠwpu‰‰‰ï, •xŽR‘åŠw, •xŽR, 2009”N9ŒŽ8“ú`11“ú, 9a-TC-5.
- ‹{轈ê, uƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[‚Ì’§í\Þ—¿EƒvƒƒZƒXEƒfƒoƒCƒX‚ÌV“WŠJv‚ɂ‚¢‚Ä, 2009”NH‹G ‘æ70‰ñ‰ž—p•¨—ŠwŠwpu‰‰‰ï, •xŽR‘åŠw, •xŽR, 2009”N9ŒŽ8“ú`11“ú, 8p-TE-1.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ26‰ñ ”––ŒƒXƒN[ƒ‹, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2009”N7ŒŽ7“ú`8“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{è ½ˆê, XüŒõ“dŽq•ªŒõ‚É‚æ‚é•\–ÊEŠE–Ê•]‰¿, ”––Œ‘æ131ˆÏˆõ‰ï, ‘æ4‰ñŠî‘buÀu”––Œ•]‰¿‹Zpv, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2008”N10ŒŽ24“ú, pp. 13-22.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ25‰ñ ”––ŒƒXƒN[ƒ‹, H•Û‰·ò¶Š¨, å‘ä, 2008”N7ŒŽ10“ú`11“ú.
- ‹{è ½ˆê, ƒVƒŠƒRƒ“•\–Ê‚¨‚æ‚ыɔ–ƒQ[ƒg≖Œ‚ÌŒ‡Š×•]‰¿, “ú–{‘åŠw ’ÓcÀƒLƒƒƒ“ƒpƒXA•\–Ê‹Zp‹¦‰ï‘æ117‰ñu‰‰‘å‰ï, 2008”N3ŒŽ12“ú`14“ú.
- ‹{è ½ˆê, ‹à‘®/High-k ƒQ[ƒg≖ŒŠE–ʂ̌õ“dŽq•ªŒõ•ªÍ-‰»ŠwŒ‹‡ó‘Ô‚ÆŽÀŒøŽdŽ–ŠÖ”•]‰¿, ƒQ[ƒg≖Œ‚Ì•¨—-‚æ‚è[‚¢‹c˜_‚ð’Ê‚¶‚ÄAŽŸ‚Ö‚Ì“WŠJ‚ð’T‚é-, ‚’m, 2007”N12ŒŽ26“ú, pp. 1-10.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{è ½ˆê, XüŒõ“dŽq•ªŒõ‚É‚æ‚é•\–ÊEŠE–Ê•]‰¿, ”––Œ‘æ131ˆÏˆõ‰ï, ‘æ3‰ñŠî‘buÀu”––Œ•]‰¿‹Zpv, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2007”N10ŒŽ18“ú, pp. 13-22.
- ‹{è ½ˆê, Si/≖Œ(high-k/SiO2)‚ÌŠE–Êó‘Ô•]‰¿‚Æ“d‹C“Á«, ‘æ34‰ñƒAƒ‚ƒ‹ƒtƒ@ƒXƒZƒ~ƒi[, ‘ ‰¤, 2007”N9ŒŽ27“ú`29“ú.
- ‹{è ½ˆê, Si—ÊŽqƒhƒbƒg‚ð—p‚¢‚½•‚—VƒQ[ƒgƒƒ‚ƒŠ[, ‰ž—p•¨—Šw‰ï •½¬19”N”––ŒE•\–Ê•¨—•ª‰È‰ïƒZƒ~ƒi[, ‘ˆî“c‘åŠw, 2007”N7ŒŽ17“ú`18“ú, p.27-36.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ24‰ñ ”––ŒƒXƒN[ƒ‹, •l–¼ŒÎƒƒCƒ„ƒ‹ƒzƒeƒ‹, •l¼Žs, 2007”N7ŒŽ11“ú`13“ú
- ‹{è ½ˆê, d‚wüŒõ“dŽq•ªŒö–@‚É‚æ‚é‹É”–HfŒnŽ_‰»–Œ‚̉»ŠwŒ‹‡ó‘Ô‚¨‚æ‚Ñ“dŽqó‘Ô•]‰¿, ƒVƒŠƒRƒ“ƒiƒmƒGƒŒƒNƒgƒƒjƒNƒXŒ¤‹†‚Æ•úŽËŒõ, •ºŒÉŒ§²—pŒS, 2006”N11ŒŽ13“ú.
- ‹{è ½ˆê, —ÊŽqƒhƒbƒgŒ`¬‚ƃfƒoƒCƒX‰ž—p, ”––ŒÞ—¿ƒfƒoƒCƒXŒ¤‹†‰ï ‘æ3‰ñŒ¤‹†W‰ïu”––ŒƒfƒoƒCƒX‚ÌV“WŠJv, pp. 50-57, ‚ ‚·‚È‚ç‰ï‹cê, “Þ—Ç, 2006”N11ŒŽ10“ú`11“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, XüŒõ“dŽq•ªŒõ‚É‚æ‚é”––Œ‚¨‚ÑŠE–Ê•]‰¿, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ3‰ñ Šî‘buÀ, ƒLƒƒƒ“ƒpƒXƒCƒmƒx[ƒVƒ‡ƒ“ƒZƒ“ƒ^[“Œ‹ž, 2006”N10ŒŽ17“ú.
- ‹{è ½ˆê, ƒƒ^ƒ‹ƒQ[ƒg/≖ŒŠE–ʂ̉»Šw\‘¢•ªÍ‚ÆŽÀŒøŽdŽ–ŠÖ”•]‰¿, ‘æ‚U‚V‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï, —§–½ŠÙ‘åŠw, 2006”N8ŒŽ29“ú`9ŒŽ1“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ23‰ñ ”––ŒƒXƒN[ƒ‹, ‘åˆéƒvƒŠƒ“ƒXƒzƒeƒ‹, 2006”N6ŒŽ28`30“ú.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{è ½ˆê, ULSI”––ŒƒvƒƒZƒX‚ÌŠî‘b•¨—, ”¼“±‘ÌŠE–ʧŒä‹Zp‘æ154ˆÏˆõ‰ï uK‰ï, “Œ‹ž, 2005”N11ŒŽ10“ú, pp. 13-25.
- ‹{è ½ˆê, ƒQ[ƒg≖Œ‚¨‚æ‚ÑMOSŠE–ʂ̉»Šw\‘¢‚¨‚æ‚Ñ“dŽqó‘Ô•ªÍ, ‘æ34‰ñ”––ŒE•\–Ê•¨—Šî‘buÀ(JSAP No.AP052348), “Œ‹ž, 2005”N11ŒŽ10“ú`11“ú, pp. 25-34.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ22‰ñ ”––ŒƒXƒN[ƒ‹, ‚Ȃɂíˆê…, ¼]Žs, 2005”N7ŒŽ13“ú`15“ú
- ‹{è ½ˆê, ƒVƒŠƒRƒ“Œn—ÊŽqƒhƒbƒg‚̉דdó‘Ô§Œä‚ƃtƒ[ƒeƒBƒ“ƒOMOSƒfƒoƒCƒX‚ւ̉ž—p, ‰ž—p•¨—Šw‰ï, ‰ž—p“dŽq•¨«•ª‰È‰ïŒ¤‹†—á‰ïuƒiƒmƒVƒŠƒRƒ“‚Ìŋ߂Ìi“W|—ÊŽqƒTƒCƒYƒVƒŠƒRƒ“‚ÌV‚µ‚¢‰Â”\«v, “Œ‹ž—‰È‘åŠw—‘‹‰ïŠÙ, 2005”N5ŒŽ27“ú, pp. 65-70.
- ‹{è ½ˆê, ƒVƒŠƒRƒ“—ÊŽqƒhƒbƒg‚̉דdó‘Ô§Œä‚ƃtƒ[ƒeƒBƒ“ƒOƒQ[ƒgMOSƒfƒoƒCƒX‚ւ̉ž—p, –¢“¥EƒiƒmƒfƒoƒCƒXƒeƒNƒmƒƒW[‘æ151ˆÏˆõ‰ï ‘æ72‰ñŒ¤‹†‰ï, “Œ‹ž, 2005”N5ŒŽ13“ú, pp. 23-32.
- ‹{è ½ˆê, SiŒn—ÊŽqƒhƒbƒg‚̉דdó‘Ô§Œä‚ƃtƒ[ƒeƒBƒ“ƒOƒQ[ƒgMOSƒfƒoƒCƒX‚ւ̉ž—p, ‘æ52‰ñ‰ž—p•¨—ŠwŠÖŒW˜A‡u‰‰‰ï, ƒVƒ“ƒ|ƒWƒEƒ€uƒVƒŠƒRƒ“ƒiƒmƒGƒŒƒNƒgƒƒjƒNƒX‚ÌV“WŠJ|ƒ|ƒXƒgƒXƒP[ƒŠƒ“ƒOƒeƒNƒmƒƒW[|v, é‹Ê‘åŠw, 2005”N3ŒŽ29“ú`4ŒŽ1“ú, 30p-S-4.
- ‹{è ½ˆê, HfŒn‚—U“d—¦â‰–ŒƒQ[ƒgƒXƒ^ƒbƒN‚É‚¨‚¯‚éŠE–Ê”½‰ž§Œä, ‘æ65‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï, “Œ–kŠw‰@‘åŠw, 2004”N9ŒŽ2“ú, p. 39.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ21‰ñ”––ŒƒXƒN[ƒ‹, H•Û‰·ò¶Š¨, å‘ä, 2004”N7ŒŽ7]9“ú.
- ‹{è ½ˆê, ‚—U“d—¦â‰–Œ/SiŠE–ʂ̊î‘b•¨«, ‘æ51‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ïAƒVƒ“ƒ|ƒWƒEƒ€uHigh-kƒQ[ƒg≖Œ|Œ»ó‚Ɖۑè|v, “Œ‹žH‰È‘åŠw, 2004”N3ŒŽ28“ú, p. 2.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ20‰ñ”––ŒƒXƒN[ƒ‹, –¼“SŒ¢ŽRƒzƒeƒ‹, Œ¢ŽR, 2003”N7ŒŽ2]4“ú.
- ‹{è ½ˆê, ‚—U“d—¦ƒQ[ƒg≖Œ‚ÌŒõ“dŽq•ªŒõ•ªÍ|ƒGƒlƒ‹ƒM[ƒoƒ“ƒhƒAƒ‰ƒCƒƒ“ƒg•]‰¿‚¨‚æ‚Ñ‚Š´“xŒ‡Š×Œv‘ª|, “Á’茤‹†u’´‹@”\‰»ƒOƒ[ƒoƒ‹EƒCƒ“ƒ^[ƒtƒFƒCƒXEƒCƒ“ƒeƒOƒŒ[ƒVƒ‡ƒ“Œ¤‹†vƒe[ƒ}uƒOƒ[ƒoƒ‹EƒCƒ“ƒeƒOƒŒ[ƒVƒ‡ƒ“‚Ì‚½‚ß‚ÌVÞ—¿‚ƃvƒƒZƒX‹Zpv, –¼ŒÃ‰®‘åŠw, 2003”N5ŒŽ26“ú.
- ‹{è ½ˆê, ƒVƒŠƒRƒ“ƒiƒmƒfƒoƒCƒXEƒvƒƒZƒX‹Zp[ƒeƒ‰ƒrƒbƒgî•ñƒiƒmƒGƒŒƒNƒgƒƒjƒNƒX‚Ö‚Ì“WŠJ[, –¼ŒÃ‰®‘åŠw“d‹CŒn‚Q‚P¢‹I COE ƒVƒ“ƒ|ƒWƒEƒ€ ƒvƒ‰ƒYƒ}‚ª‘ñ‚ƒiƒmî•ñƒfƒoƒCƒX‚Ì¢ŠE“I‹’“_Œ`¬‚ÉŒü‚¯‚Ä, –¼ŒÃ‰®‘åŠw, 2003”N3ŒŽ3“ú, pp. 1-7.
- ‹{è ½ˆê, ”¼“±‘̃iƒmƒ[ƒgƒ‹ƒhƒbƒg‚ÌŒ`¬‚Æ‹@”\ƒƒ‚ƒŠƒfƒoƒCƒX‰ž—p, •½¬14”N“x“Œ–k‘åŠw“d‹C’ÊMŒ¤‹†Š‹¤“¯ƒvƒƒWƒFƒNƒgŒ¤‹†‰ïuƒTƒuƒT[ƒtƒFƒX§Œä’m”\ƒvƒ‰ƒYƒ}ƒvƒƒZƒX‚ÉŠÖ‚·‚錤‹†v, “Œ–k‘åŠw, 2002”N10ŒŽ5“ú, pp. 115-123.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, ‰»Šw‹C‘Š‘ÍÏ–@(CVD), “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ19‰ñ”––ŒƒXƒN[ƒ‹, ’}”gŽR@]ŒË‰®, 2002”N7ŒŽ3]5“ú, pp. 83-100.
- ‹{è ½ˆê, Si—ÊŽqƒhƒbƒg‚ÌŽ©ŒÈ‘gD‰»Œ`¬‚ƃƒ‚ƒŠ[ƒfƒoƒCƒX‰ž—p, •½¬13”N“x‘æ1‰ñŒ¤‹†‰ÈƒtƒH[ƒ‰ƒ€uƒVƒ‰ƒ“ŒnCVDƒvƒƒZƒX‚ÌŠî‘b‚©‚牞—p‚Ü‚Åv, –k—¤æ’[‰ÈŠw‹Zp‘åŠw‰@‘åŠwÞ—¿‰ÈŠwŒ¤‹†‰È, 2002”N3ŒŽ15“ú, pp. 77-88.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD:‰»Šw‹C‘Š‘ÍÏ–@, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ18‰ñ”––ŒƒXƒN[ƒ‹, 2001”N7ŒŽ4]6“ú, ’W˜H‘Û‰ï‹cê, pp. 85-101.
- ‹{è ½ˆê, ƒQ[ƒg≖Œ‹Zpi‚—U“d—¦ƒQ[ƒg≖Œj, ‘æ28‰ñ‰ž—p•¨—Šw‰ïƒXƒN[ƒ‹BuƒTƒu100nmCMOSƒgƒ‰ƒ“ƒWƒXƒ^‹Zp‚Ì“®Œü‚Æ“W–]v, –¾Ž¡‘åŠw, 2001”N3ŒŽ30“ú, pp. 35-47.
- ‹{è ½ˆê, MOSLSIƒQ[ƒgŽ_‰»–Œ, ‘æ48‰ñ‰ž—p•¨—Šw‰ïŠÖŒW˜A‡Šwpu‰‰‰ï, ƒVƒ“ƒ|ƒWƒEƒ€u‚«”\ƒ|ƒŠƒVƒŠƒRƒ“TFT‚ÌŒ»ó‚Æ«—ˆ“W–]|ƒQ[ƒgŽ_‰»–ŒŒ`¬v,–¾Ž¡‘åŠw, 2001”N3ŒŽ29“ú, p. 87.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD¬–Œ‚Ì•¨—|ƒVƒŠƒRƒ“Œn”––ŒŒ`¬‚ð’†S‚Æ‚µ‚Ä, ‘æ32‰ñCVDŒ¤‹†‰ï, ˆ¤’mŒú¶”N‹à‰ïŠÙ, 2000”N12ŒŽ13“ú, Šî‘buÀ:pp.1-16.
- ‹{轈ê, Ž…ìŠ°Žu, ¬Š}Œ´—D, œA£‘SF, ‚—U“d—¦ƒQ[ƒg≖Œ‚ð—p‚¢‚½MIS\‘¢‚É‚¨‚¯‚éƒGƒlƒ‹ƒM[ƒoƒ“ƒhƒvƒƒtƒ@ƒCƒ‹‚ÌŒˆ’è‚ÆŠE–Ê“dŽqó‘ÔŒv‘ª, ‰ž—p•¨—Šw‰ï ƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[•ª‰È‰ï ‘æ23‰ñŒ¤‹†‰ïuƒQ[ƒg≖Œ‹Zp‹y‚уfƒoƒCƒXEƒvƒƒZƒX‹Zpv, “Œ‹žH‹Æ‘åŠw, 2000”N11ŒŽ1“ú, pp. 58-63.
- ‹{轈ê, Œ¸ˆ³CVD‚É‚æ‚éƒVƒŠƒRƒ“—ÊŽqƒhƒbƒg‚ÌŽ©ŒÈ‘gD‰»Œ`¬,iŽÐj“dŽqî•ñ‹ZpŽY‹Æ‹¦‰ï —ÊŽq‘ŠŠÖƒGƒŒƒNƒgƒƒjƒNƒXê–åˆÏˆõ‰ï, L“‡‘åŠw, 2000”N10ŒŽ16“ú.
- ‹{轈ê, ƒVƒŠƒRƒ“¥‹É”–ƒQ[ƒgŽ_‰»–ŒŠE–Ê, ‘æ61‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï, ƒVƒ“ƒ|ƒWƒEƒ€u”¼“±‘ÌŠE–ÊŒ`¬|Œ´ŽqƒŒƒxƒ‹‚Ì•\–Ê¥ŠE–ʧŒä‚ð–ÚŽw‚µ‚Äv, –kŠC“¹H‹Æ‘åŠw, 2000”N9ŒŽ5“ú, 5p-L-6, p. 40.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD–@‚É‚æ‚é”––ŒŒ`¬‹Zp‚Æ”½‰ž§Œä, ‹Zpî•ñ‹¦‰ï ƒGƒŒƒNƒgƒƒjƒNƒX¥Þ—¿‹ZpƒZƒ~ƒi[, ŒÜ”½“cE‚䂤‚Û‚¤‚Æ, 2000”N8ŒŽ22“ú, No.008402, pp. 1-16.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD:‰»Šw‹C‘Š‘ÍÏ–@, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ17‰ñ”––ŒƒXƒN[ƒ‹, H•Û‰·ò¶Š¨, å‘ä, 2000”N7ŒŽ12`14“ú, pp. 89-104.
- ‹{轈ê, ƒVƒŠƒRƒ“ƒiƒmŒ‹»‚ÌŽ©ŒÈ‘gD‰»Œ`¬‚ÆŽŸ¢‘ãƒtƒ|ƒeƒBƒ“ƒOMOSƒƒ‚ƒŠ‰ž—p, –¼ŒÃ‰®‘åŠwŽáŽèŒ¤‹†ƒvƒƒWƒFƒNƒgƒVƒ“ƒ|ƒWƒEƒ€|ŽŸ¢‘ãƒfƒoƒCƒX‘n»‚Ì‚½‚߂̃iƒmƒhƒbƒgŒ`¬ƒvƒƒZƒX|, –¼ŒÃ‰®‘åŠwVBL, 1999”N12ŒŽ1“ú, p. 2.1.
- ‹{轈ê, ƒVƒŠƒRƒ“—ÊŽqƒhƒbƒg‚ÌŽ©ŒÈ‘gD‰»Œ`¬‚ƃtƒ[ƒeƒBƒ“ƒOMOSƒƒ‚ƒŠƒfƒoƒCƒX‚ւ̉ž—p, iàjV¢‘㌤‹†Š ”¼“±‘Ì—ÊŽqŒø‰ÊŒ¤‹†‰È‰ï, ‹{“‡, 1999”N10ŒŽ18“ú.
- ‹{轈ê, CVD‚É‚æ‚éSiƒiƒmƒNƒŠƒXƒ^ƒ‹‚̬’·‚Æ”Œõ“Á«, ‰»ŠwHŠw‰ï@f99CVD“Á•ÊŒ¤‹†‰ïuƒVƒŠƒRƒ“ƒiƒmƒNƒŠƒXƒ^ƒ‹‚̬’·•û–@‚Æ”Œõ“Á«v, 1999”N10ŒŽ15“ú, “Œ‹ž‘åŠwEHŠw•”, pp. 6.1-7.
- ‹{轈ê, œA£‘SF, ƒVƒŠƒRƒ“—ÊŽqƒhƒbƒg‚ÌŽ©ŒÈ‘gD‰»Œ`¬‚ƃtƒ[ƒeƒBƒ“ƒOƒQ[ƒgMOSƒƒ‚ƒŠ‚̉ž—p, 1999”N“dŽqî•ñ’ÊMŠw‰ïƒ\ƒTƒCƒGƒeƒB‘å‰ï, ƒVƒ“ƒ|ƒWƒEƒ€uŽ©ŒÈ‘gD‰»ƒvƒƒZƒX‚ƃfƒoƒCƒX‰ž—pv, “ú–{‘åŠw, 1999”N9ŒŽ9“ú, SC]8]4.
- ‹{轈ê, œA£‘SF, ƒVƒŠƒRƒ“—ÊŽqƒhƒbƒg‚ÌŽ©ŒÈ‘gD‰»Œ`¬‚Æ—ÊŽq‹@”\§Œä, ‘æ60‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï, ƒVƒ“ƒ|ƒWƒEƒ€uV‚µ‚¢ƒVƒŠƒRƒ“ŒnÞ—¿‚Ì‘n»‚Ɖž—pv, b“ì‘åŠw, 1999”N9ŒŽ2“ú, 2p-ZM-3, p. 29.
- ‹{轈ê, ‹É”÷×\‘¢§Œä‚ƃVƒŠƒRƒ“ƒfƒoƒCƒX, ƒtƒƒ“ƒeƒBƒAƒvƒƒZƒX99|ƒvƒ‰ƒYƒ}ƒvƒƒZƒX‚Ì¡Œã‚Ì“W–], ƒvƒ‰ƒYƒ}ƒvƒƒZƒXƒpƒiƒVƒA‚̉ïŽåà ’´æ’[“dŽq‹ZpŠJ”‹@\iASETj‹¤Ã, Óì‘Û‘ºƒZƒ“ƒ^[“à‰ï‹cê, 1999”N7ŒŽ30“ú, p. 1.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD]‰»Šw‹C‘Š‘ÍÏ–@, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï@‘æ16‰ñ”––ŒƒXƒN[ƒ‹, Šò•ŒŠÏŒõƒzƒeƒ‹\”ª˜O, Šò•Œ, 1999”N6ŒŽ30“ú`7ŒŽ2“ú, pp. 95-111.
- ‹{轈ê, ƒVƒŠƒRƒ“•\–Ê¥ŠE–ʂ̌‡Š×€ˆÊ‚Æ…‘f‚É‚æ‚é•sŠˆ«‰», ‰ž—p•¨—Šw‰ï Œ‹»HŠw•ª‰È‰ï ‘æ110‰ñŒ¤‹†‰ïu…‘f‚ÆŒ‹»HŠwv, ŠwK‰@‘åŠw, 1999”N6ŒŽ3“ú, pp. 27-34.
- ‹{轈ê, ]“¡˜aé, œA£‘SF, Ž©ŒÈ‘gD‰»Œ`¬ƒVƒŠƒRƒ“—ÊŽqƒhƒbƒg‚©‚ç‚Ì”Œõ“Á«, ‰ž—p•¨—Šw‰ï ƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[•ª‰È‰ï ‘æ8‰ñŒ¤‹†‰ïuŒõ‚éƒVƒŠƒRƒ“|ƒvƒƒZƒX¥‘fŽq‹Zp‚Ìi“W‰ïv, “Œ‹ž”_H‘åŠw, 1999”N4ŒŽ23“ú, pp. 54-6054.
- ‹{轈ê, –Œ‘Íωߒö‚É‚¨‚¯‚鉻ŠwŒ‹‡ó‘Ô‚¨‚æ‚уlƒbƒgƒ[ƒN\‘¢‚̕ω», ‰ž—p•¨—Šw‰ï ”––Œ•\–Ê•¨—•ª‰È‰ï 1998”N“x‘æ3‰ñŒ¤‹†‰ïuƒvƒ‰ƒYƒ}CVD•\–Ê”½‰ž‚͂ǂ±‚܂ŗ‰ð¥§Œä‚³‚ê‚Ä‚¢‚é‚©Hv, ‹@ŠBU‹»‰ïŠÙ, 1998”N11ŒŽ26“ú, pp. 4.1-5.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ15‰ñ”––ŒƒXƒN[ƒ‹, ˆÉ“Œƒzƒeƒ‹ƒjƒ…[‰ª•”, ˆÉ“Œ, 1998”N7ŒŽ1`3“ú, pp. 95-111.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, CVD, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ14‰ñ”––ŒƒXƒN[ƒ‹, ”ú”iŒÎƒzƒeƒ‹, ‘å’Ã, 1997”N7ŒŽ2`4“ú, pp. 59-71.
- ‹{轈ê, •Ÿ“c‰ër, ŽÄ˜a—˜, ’†ì˜a”V, œA£‘SF, –ì~, Si—ÊŽqƒhƒbƒg‚ÌŽ©ŒÈ‘gD‰»Œ`¬‚ÆŽº‰·—ÊŽq•¨«, “dŽqî•ñ’ÊMŠw‰ï “dŽqƒfƒoƒCƒXŒ¤‹†ê–åˆÏˆõ‰ï, ’P“dŽqƒfƒoƒCƒX“Á•ʃ[ƒNƒVƒ‡ƒbƒv, L“‡ƒAƒXƒe[ƒ‹ƒvƒ‰ƒU, 1997”N3ŒŽ14“ú, MŠw‹Z•ñ, ED96]221, pp. 39-48.
- ‹{轈ê, œA£‘SF, ‹É”–ƒVƒŠƒRƒ“Ž_‰»–Œ‚Ì\‘¢‚Æ“dŽqó‘Ô, ‘æ57‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï, ƒVƒ“ƒ|ƒWƒEƒ€uƒVƒŠƒRƒ“Ž©‘RŽ_‰»–Œ‚©‚ç‹É”–Ž_‰»–Œ‚ÌŒ`¬‚Æ•¨—i‚hjv, ‹ãBŽY‹Æ‘åŠw, 1996”N9ŒŽ9“ú, 9‚-E]4, p. 1236.
- [ƒ`ƒ…[ƒgƒŠƒAƒ‹]‹{轈ê, ”––Œ‚Ì“`“±‹@”\, “ú–{ŠwpU‹»‰ï ”––Œ‘æ131ˆÏˆõ‰ï ‘æ13‰ñ”––ŒƒXƒN[ƒ‹, ˜a•—ƒyƒ“ƒWƒ‡ƒ“‚Ђ܂í‚艑, “ß{‰–Œ´, 1996”N6ŒŽ26`28“ú, pp. 43-53.
- ‹{轈ê, œA£‘SF, ‰»Šwôò‚µ‚½Si•\–Ê‚Ì\‘¢‚¨‚æ‚Ñ“dŽqó‘Ô•]‰¿, ‘æ43‰ñ‰ž—p•¨—Šw‰ïŠÖ˜AŠwpu‰‰‰ï, ƒVƒ“ƒ|ƒWƒEƒ€u…ôò‚É‚æ‚éSi´ò¥Š®‘S•\–ʂ̌`¬‚ð–ÚŽw‚µ‚Äv, “Œ—m‘åŠw, 1996”N3ŒŽ26“ú, 28p]k]7, p. 1403.
’˜‘A˜aŽGŽiŠw‰ïŽ“™j‰ðà“™
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- ‹{è ½ˆê, ƒ}ƒCƒNƒEƒiƒm—̈æ‚Ì’´¸–§‹ZpiƒI[ƒ€ŽÐA2011j•ª’SŽ·•MF‘æ‚RÍ uSi Œni‹É”÷׉»‚ÌŠÏ“_‚ð’†S‚É‚µ‚Äjv pp. 152-160, ISBN-13: 978-4274210051.
- ‹{轈ê, ‰ž—p•¨—•ª–ì‚̃AƒJƒfƒ~ƒbƒNEƒ[ƒhƒ}ƒbƒvuƒVƒŠƒRƒ“‹Zpv •ª’SŽ·•MF‰ž—p•¨—, Vol.79, No. 8 (2010) pp. 691-693.
- S. Miyazaki and H.Tabata, Thechnology Evolution for Silicon Nano-Electronics (Trans Tech Pub., 2011) ISBN-13: 978-3-03785-351-0; M. Muraguchi, Y. Sakurai, Y. Tkada, Y. Shigeta, M. Ikeda, K. Makihara, S. Miyazaki , S. Nomura, K. Shiraishi and T. Endo, "Collective Electron Tunnneling Model in Si-Nano Dot Floating Gate MOS Structure", Key Engineering Materials, Vol. 470 (2011) pp.48-53; N. Morisawa, M. Ikeda, K. Makihara and S. Miyazaki, "Optical Response of Si-Quantum-Dots/NiSi-Nanodots Stack Hybrid Floating Gate in MOS Structure", ibid. pp. 135-139
- ‹{è ½ˆê, ‹†‹É‚Ì‚©‚½‚¿‚ð‚‚‚éi“úЧH‹ÆV•·ŽÐA2009j•ª’SŽ·•MF‘æ1Í uƒiƒmƒTƒCƒY‚Ì‚©‚½‚¿‚ð‚‚‚év pp. 13-28, ISBN978-4-526-06277-3 C3043
- ‹{è ½ˆê, ŽÀ—p”––ŒƒvƒƒZƒX\‹@”\‘n»E‰ž—p“WŠJ\i‹Zp‹³ˆço”ÅŽÐA2009j•ª’SŽ·•MF‘æ1•Ò ‘n»‹Zp ‘æ5Í uCVDv pp. 68-90, ISBN978-4-907837-18-1 C3058
- “Œ@´ˆê˜Y, ‹{è@½ˆê, ”Mƒvƒ‰ƒYƒ}‚É‚æ‚éƒAƒ‚ƒ‹ƒtƒ@ƒXƒVƒŠƒRƒ“‚ÌŒ‹»‰», ƒvƒ‰ƒYƒ}EŠj—Z‡Šw‰ïŽ, Vol. 85, No. 3 (2009), pp. 119-123.
- ‹{è ½ˆê, ŽŸ¢‘㔼“±‘̃ƒ‚ƒŠ‚ÌÅV‹ZpiƒV[ƒGƒ€ƒV[o”ÅA2009j•ª’SŽ·•MF‘æ6Í uƒVƒŠƒRƒ“Œnƒiƒm\‘¢WςƋ@”\ƒƒ‚ƒŠƒfƒoƒCƒXŠJ”v pp. 265-277, ISBN978-4-88231-992-4@C3054; •‹y”Åi2013) ISBN-13: 978-4781307350
- S. Miyazaki, Advances in Electronic Materials, Eds. E. Kasper, H.-J. Muessing and H. G. Grimmeiss (Trans Tech Pub., 2009) Nitrogen Incorporation: Infuluence on Electrical Parameters of HfSiON, Mat. Sci. Forum, Vol. 608, pp. 91-109, ISBN-13: 978-0-87849-347-0
- S. Miyazaki, M. Ikeda, K. Makihara, K. Shimonoe and R. Matsumoto, Smart Materials for Smart Devices and Structures, Eds. M. Leonowicz and D. Oleszak (Trans Tech Pub., 2009) Formation of Metal Silicide Nanodots on Ultrathin SiO2 for Floating Gate Application, Solid State Phenomena, Vol. 154, pp. 95-100, ISBN-13: 978-3-908451-70-9
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- ‹{è ½ˆê, ƒVƒŠƒRƒ“Œn—ÊŽqƒhƒbƒg‚̉דdó‘Ô§Œä‚ƃtƒ[ƒeƒBƒ“ƒOƒQ[ƒg‚l‚n‚rƒfƒoƒCƒX‚ւ̉ž—p, ‰ž—p“dŽq•¨«•ª‰È‰ïŽ, Vol. 11, No. 2 (2005) pp. 65-70.
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- ‹{è ½ˆê, •\–ʉȊw‚ÌŠî‘b‚Ɖž—piƒGƒkEƒeƒB[EƒGƒX, 2004) •ª’SŽ·•M: ‘æ3•Ò, ‘æ1Í ‘æ2ß uSi‚Ì”MŽ_‰»‹@\ASi•\–ʂ̔MŽ_‰»ASiŽ_‰»–Œ‚Ì\‘¢A‹É”–SiŽ_‰»–Œ‚¨‚æ‚ÑSi/SiO2ŠE–ʂ̕ªÍv pp.879-889, ISBN-13: 978-4860430511
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‚»‚Ì‘¼‚ÌŠñeAƒCƒ“ƒ^ƒrƒ…[‹LŽ–Au‰‰
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- ‹{è ½ˆê, HŠw‹³ˆç‚Ö‚‚Ü‚éŠú‘Ò, HŠw‹³ˆç, Vol.70, No. 5. p.‚P(iŒöŽÐj“ú–{HŠw‹³ˆç‹¦‰ï, 2022) H‹³Œ¾D
- ‹{è ½ˆê, –¼ŒÃ‰®‘åŠw ‘åŠw‰@HŠwŒ¤‹†‰È‚É‚¨‚¯‚éŽYŠw˜AŒg‹³ˆç‚ÌŽÀтƎæ‚è‘g‚Ý, “ú–{HŠw‹³ˆç‹¦‰ï”NŽŸ‘å‰ï“Á•ʃZƒbƒVƒ‡ƒ“^“ŒŠCHŠw‹³ˆç‹¦‰ï ’n‹æ‘å‰ïsŽ– ŽYŠwН˜AŒg‚ð’Ê‚µ‚½ŽÀ‘H“IHŠw‹³ˆç`Ž–—áÐ‰î‚ÆƒfƒBƒXƒJƒbƒVƒ‡ƒ“`(–¼ŒÃ‰®H‹Æ‘åŠw, 2018.8.31j.
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@- uGaN/SiC\‘¢‚ÌŒõ“dŽq•ªŒõ•ªÍvi•½¬25-—ߘa28”N“xj
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@- uIV ‘°”¼“±‘Ì—ÊŽqƒhƒbƒg‚̉¿“dŽq§Œä‚ÆMOS ƒƒ‚ƒŠ‚ւ̉ž—pvi•½¬19-21”N“xj
@@@“Œ–k‘åŠw“d‹C’ÊMŒ¤‹†ŠA‹¤“¯Œ¤‹†ƒvƒƒWƒFƒNƒg
ŽóÜ—ð
- Best Presentation Award in the area of Nanomaterials, ISPlasma 2021/IC-PLANTS 2021 Organizing and Program Committees
2021.3.11
- Outstanding Reviewer Awards 2018 for Semiconductor Science and Technology, IOP Publishing, 2019.3.13
- MNC 2017 Award for Outstanding Paper, MNC Organizing Committee, 2018.11.14
- IWDTF2017 Best Paper Award, IWDTF2017 Organizing Committee, 2017.11.22
- Š´ŽÓó, (ŽÐj‰ž—p•¨—Šw‰ï, 2017.3.6 i—Ž–, ‘æ54ŠúE‘æ55Šúj
- Certificate for Concurrent Professorship at Nanjing University, Nanjing University, 2014.12.3
- Š´ŽÓó, (ŽÐj‰ž—p•¨—Šw‰ï, 2013.3.14 i—Ž–, ‘æ50ŠúE‘æ51Šúj
- Best Poster Presentation Award, ISPlasma 2012 Organizing and Program Committees, 2012.3.8
- cÍ, L“‡‘åŠw‘̈ç‰ï“¯‘‹‰ï, 2012.2.4
- •\²ó, (“Æj“ú–{ŠwpU‹»‰ï, 2011.9.30 i‰ÈŠwŒ¤‹†”ï•¬Ž–‹Æ@‘æˆê’iR¸j
- Š´ŽÓó, (ŽÐj‰ž—p•¨—Šw‰ï, 2011.3.29 i•]‹cˆõ, 2008]2010”N“xj
- Š´ŽÓó, (ŽÐj‰ž—p•¨—Šw‰ï, 2011.3.17 iƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[•ª‰È‰ï@вޖ’·, ‘æ11ŠúA‘æ12Šúj@
- Certificate for Concurrent Professorship at Nanjing University, Nanjing University, 2010.9.30
- ‰ž—p•¨—Šw‰ï ’†‘Žl‘Žx•” vŒ£Ü, (ŽÐj‰ž—p•¨—Šw‰ï ’†‘Žl‘Žx•”, 2010.7.30
- Š´ŽÓó, (ŽÐjL“‡H‹Æ‰ï, 2010.5.31
- ‰ž—p•¨—Šw‰ïƒtƒFƒ[•\², (ŽÐj‰ž—p•¨—Šw‰ï, 2009.9.8
- APS Certificate to Invited Speaker (Planary Talk), 3rd Asian Physics Symp. (APS), 2009.7.23
- Invited Presentation Award, Interfinish 2008 World Congress and Exposition, 2008.6.18
- MRS Certificate of Appreciation to Symposium Organizer in 2008 Spring Meeting, Materials Research Society, 2008.4.9
- MRS Certificate of Appreciation to Symposium Organizer in 2007 Spring Meeting, Materials Research Society, 2007.4.17
- L“‡H‹Æ‰ï•\², (ŽÐjL“‡H‹Æ‰ï, 2006.8.3
- Selete Award 2004, Achievement Award
@High-k ƒlƒbƒgAL“‡‘åŠw‘åŠw‰@ æ’[•¨Ž¿‰ÈŠwŒ¤‹†‰È ‹{茤‹†Žº, ”¼“±‘Ìæ’[ƒeƒNƒmƒƒW[ƒY, 2004.05.26
- Š´ŽÓó, (ŽÐj‰ž—p•¨—Šw‰ï, 2004.1.31 (‘ã‹cˆõ, ‘æ40Šú]‘æ42Šúj
- Jpn. J. Appl. Phys. Editorial Contribution Award, JJAP, 2003.4.16
- ‹qˆõ‹³ŽöãÙ‘, ‰Í–k‘åŠw, 2002.3.10
- ˆä㌤‹†§—ãÜ, ˆäã‰ÈŠwU‹»à’c, 1987.2.4
Š‘®Šw‰ï
Šw‰ï–ðˆõEˆÏˆõ
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Šwp‹³ˆçE§—ãŠî‹àˆÏˆõ‰ï@ˆÏˆõ (2015”N“x` )
”––ŒE•\–Ê•¨—•ª‰È‰ï вޖ (1997|2018”N“x, í”CвޖF1998/1999”N“x), вޖ’· (2017.4|2019.3), ŒÚ–â (2019.4` )
ƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[•ª‰È‰ï вޖ (1999|2010”N“x, í”CвޖF2003/2004”N“x, •›Š²Ž–’·2008/2009”N“xAвޖ’·F2009/2010”N“x), Ž–âˆÏˆõ (2011.4` )
“ŒŠCŽx•” вޖ (2011-2016, 2013”N“xŠé‰æˆÏˆõ’·), Žx•”’· (2015/2016”N“x), Ž–âˆÏˆõ (2017.4|2024.3)
ƒtƒFƒ[•\²Œó•âŽÒ‘IlˆÏˆõ‰ï@ˆÏˆõ (2021.9.1|2023.8.31)
—Ž– (2011/2012”N“x; u‰‰‰ïŠé‰æE‰^‰cˆÏˆõ‰ïAu‰‰§—ã܈ψõ‰ï, 2015/2016”N“x)
‘ã‹cˆõ (2001-2003”N“x, 2012/2013”N“x, 2015/2016”N“x)
Ž–âˆÏˆõ (2013/2014”N“x)
‘ۈψõ‰ï ˆÏˆõ (2009|2012”N“x)
u‰‰‰ïŠé‰æE‰^‰cˆÏˆõ‰ï ˆÏˆõ (2013”N“x)
•]‹cˆõ (2008|2010”N“x)
’†‘Žl‘Žx•” вޖ (1995.4|2010.5)
2009”N“x’†‘Žl‘Žx•”Šwpu‰‰‰ï ŽÀsˆÏˆõ’· (2009”N8ŒŽ1“ú)
@‘æ59‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï Œ»’nŽÀsˆÏˆõ (1998”N9ŒŽ15|18“ú)
ˆê”ÊŽÐ’c–@l@“dŽqî•ñ’ÊMŠw‰ïF
- ƒVƒŠƒRƒ“Þ—¿EƒfƒoƒCƒXŒ¤‹†ê–åˆÏˆõ‰ï ê–åˆÏˆõ (1998.5 ` ): SDM6ŒŽ“xŒ¤‹†‰ï’S“–
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- ’†•”Žx•” –ðˆõ (2018.5|2024.3)
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- ‹Œj“ú–{•\–ʉȊw‰ï@’†•”Žx•” –ðˆõ (2011.5|2018.5 )
Electrochemical SocietyF
- ECS Japan Section, Member-at-large (2012.8|2016.12), 2nd Vice Chair (2017.1|2018.12), 1st Vice Chair (2019.1|2020.12), Chair (2020.1|2022.12), Councilor (2023.1|2024.12)
“d‹CŠw‰ïF
- ƒVƒXƒeƒ€WσvƒƒZƒX’²¸ê–åˆÏˆõ‰ïˆÏˆõ (2003.3|2006.3)
- ƒOƒ[ƒoƒ‹ƒCƒ“ƒeƒOƒŒ[ƒVƒ‡ƒ“ƒvƒƒZƒX’²¸ê–åˆÏˆõ‰ïˆÏˆõi2000.3|2003.3)
- ƒvƒƒZƒXEƒCƒ“ƒeƒOƒŒ[ƒVƒ‡ƒ“’²¸ê–åˆÏˆõ‰ïˆÏˆõ (1997.3|2000.3)
Œö‰vŽÐ’c–@l@“ú–{HŠw‹³ˆç‹¦‰ï:
- —Ž– (2022.6.15|2024.6)
- Ž–‹ÆŠé‰æˆÏˆõ‰ïˆÏˆõ (2018.6|2019.6)
“ú–{•úŽËŒõŠw‰ï”N‰ïE•úŽËŒõ‰ÈŠw‡“¯ƒVƒ“ƒ|ƒWƒEƒ€iJSR)‘gDˆÏˆõ‰ï:
- JSR2020‘gDˆÏˆõ/•›ŽÀsˆÏˆõ’·/ƒvƒƒOƒ‰ƒ€ˆÏˆõ@(ŠJÓúF2020”N1ŒŽ10-12“úAŠJÃ’nF–¼ŒÃ‰®j
- JSR2021‘gDˆÏˆõ (ŠJÓúF2021”N1ŒŽ8-10“úAŠJÃŒ`‘ÔFƒIƒ“ƒ‰ƒCƒ“)
- JSR2022‘gDˆÏˆõ (ŠJÓúF2022”N1ŒŽ7-9“úAŠJÃŒ`‘ÔFƒIƒ“ƒ‰ƒCƒ“)
Œö‰vŽÐ’c–@l@—§¼à’cF
- ‘IlˆÏˆõ (2018.3.9|2024.3.31j
- —Ž– (2021.4.1|2024.3.31j
ˆê”ÊŽÐ’c–@l@”ª‘åŠwHŠwŒn˜A‡‰ïF
- —Ž– (2021.4.23|2024.3.31j
Œö‰vŽÐ’c–@l@‰ÈŠw‹ZpŒð—¬à’cF
- ŽåвŒ¤‹†ˆõi2019.4|2024.3.31)
- ‚ ‚¢‚¿ƒVƒ“ƒNƒƒgƒƒ“ŒõƒZƒ“ƒ^[‰^‰cˆÏˆõ‰ïˆÏˆõi2019.4|2024.3.31)
- Šé‰æ‰^‰cˆÏˆõ‰ïˆÏˆõEˆÏˆõ’·i2021.6.2|2024.3.31)
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- ’†•”TLOŠé‰æ‰^‰cˆÏˆõ‰ïˆÏˆõ’·i2021.4.14|2024.3.31)
- ’†•”ƒnƒCƒeƒNƒZƒ“ƒ^[Šé‰æ‰^‰cˆÏˆõ‰ïˆÏˆõi2021.5.1|2024.3.31)
- —Ž–i2021.5.10|2024.3.31)
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- ’†•”ƒCƒmƒxƒlƒbƒg‰^‰cˆÏˆõEˆÏˆõ’·i2021.4.28|2024.3.31)
- ’†•”ŒöÝŽŽŒ±Œ¤‹†‹@ŠÖŒ¤‹†ŽÒ•\²@‘IlˆÏˆõi2021.5.19|2024.3.31)
- ’†•”‰ÈŠw‹ZpƒZƒ“ƒ^[Šwp§—㎖‹Æ@‘IlˆÏˆõi2021.5.19|2024.3.31)
- ’†•”‰ÈŠw‹ZpƒZƒ“ƒ^[Œ°²@‘IlˆÏˆõi2021.5.19|2024.3.31)
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- •]‹cˆõi2021.6.1|2024.3.31)
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- •]‹cˆõi2021.6.11|2024.3.31)
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- ŽQ—^i2021.4.23|2024.3.31)
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- ‰ï’·i2022.6.13|2024.3.31)
Šwp˜_•¶•ÒWˆÏˆõ
- e-Journal of Surf. Sci. and Nanotechnology, Ed. Board Member (2003 | present)
- Nanomaterials, MDPI, Editorial Board Member (2020 | present)
- ECS Trans. Vol. 109, No.4 (2022), Vol. 98, No. 5 (2020), Vol. 85, No.16 (2018), Vol.75, No.8 (2016), Vol.64, No. 6 (2014), Ed. Member
- IEICE Trans. on Electronics; E105-C, No. 10 (2022), E103-C, No. 6 (2020), E102-C, No. 6 (2019), E101-C, No. 5 (2018), E100-C, No. 5 (2017), E99-C, No. 5 (2016), E98-C, No. 5 (2015), E97-C, No. 5 (2014), E96-C, No. 5 (2013), E95-C, No.5 (2012), E94-C, No.5 (2011), E93-C, No.5 (2010), E92-C, No.5 (2009), E91-C, No.5 (2008), E90-C, No.5 (2007), E89-C, No.5 (2006): Special Section on Fundamental and Applicationof Advanced Semiconductor Devices, Ed. Commitee Member
- Article collections on Control of Semiconductor Interfaces @ Materials Science in Semiconductor Processing, (2020), Editor
- Materials Science in Semiconductor Processing, Vol. 70 (2017), Guest Editor
- Thin Solid Films, Vol 557, 30 (2014), Managing Gest Editor
- J. Non-Cryst. Solids, Vol.358, Issue 17 (2012) : Special Issue for Proc. of the 24th Int. Conf. on Amorphous and Nanocrystalline Semiconductors (ICANS 24) Guest Editor (Head of Guest Editors)
- Key Engineering Materials, Vol.470 "Technology Evolution for Silicon Nano-Electronics", (2011) Editor
- Jpn. J. Appl. Phys. 50, No.4B (2011), 49, No.4B (2010), 48, No.4B (2009), 47, No.4B (2008), 46. No.4B (2007), 45. No.4B (2006), 44. No.4B (2005), 43. No.4B(2004), 42. No.4B (2003): Special Issue for Int. Conf. on Solid State Devices and Material, Ed. Commitee Member
- Jpn. J. Appl. Phys. 50, No.1 (2011): Selected Topics in Applied Physics: Technology Evolution for Silicon Nano-Electronics, Guest Editor
- IEICE Trans. on Electronics: Special Issue 2005-4EC, Ed. Commitee Member
- IEICE Trans. on Electronics E87-C, No.1 (2004): Special Section on High-k Gate Dielectrics, Guest Editor
- Jpn. J. Appl. Phys. 40, No.4B (2001): Special Issue for 2000 Int. Conf. on Solid State Devices and Material, Ed. Commitee Chairperson
- Jpn. J. Appl. Phys. Assoc. Editor (1998 | 2002)
ŽÐ‰ï‚ł̊ˆ“®
“ú–{ŠwpU‹»‰ï ŽYŠw‹¦—ÍŒ¤‹†ˆÏˆõ‰ï:
- R025æi”––ŒŠE–Ê‹@”\‘n¬ˆÏˆõ‰ï ˆÏˆõ (2020.6`@)
- ƒAƒ‚ƒ‹ƒtƒ@ƒXEƒiƒmÞ—¿‘æ147ˆÏˆõ‰ï ˆÏˆõ (2008` )
- ‹¦—͉ï•]‹cˆõ (2018.5 | 2020.9)
- ”¼“±‘ÌŠE–ʧŒä‹Zp‘æ154ˆÏˆõ‰ï ˆÏˆõ’· (2013.4 | 2020.6), Šé‰æŠ²Ž–’· (2008.4 | 2013.3), Šé‰æ•›Š²Ž–’· (2004.4 | 2008.3), Šé‰æŠ²Ž–i2001.4 | 2013.3)
- ”––Œ‘æ131ˆÏˆõ‰ï Šé‰æˆÏˆõ (1993 | 2020.6), Ž–±Š²Ž– (1999.4 | 2004.3)
- ƒvƒ‰ƒYƒ}Þ—¿‰ÈŠw‘æ153ˆÏˆõ‰ï ˆÏˆõ (1998 | 2003.3)
‘Û‰ï‹cƒvƒƒOƒ‰ƒ€ˆÏˆõ
- 6th International Conference on Electronics, Communications and Control Engineering (ICECC 2023; Fukuoka, 2022) Co-chair
- 19th Int. Conf. on Gettering and Defect Engineering in Semiconductor Technology (19th-GADEST, Mondsee, Austria, Sept. 11-17,2021)
- Int. Symp. on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials/Int. Conf. on Plasma-Nano Technology (ISPlasma/IC-PLANTS; 2014 | 2018, 2020 ` )
- Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices (AWAD; 2000 ` ) 2012(Chair)
- Int. Symp on Dry Process (DPS; 2005 | 2009, 2011` )
- Int. Workshop on New Group IV Semiconductor an Nanoelectronics (Sendai, 2005 ` )
- 1st joint Int. SiGe Technology and Device Meeting (ISTDM)/Int. Conf. on Silicon Epitaxy and Heterostructures (ICSI) (1st Joint ISTDM/ICSI Conf., Potsdam, 2018) Co-chair
- European Mat. Res. Soc. Fall Meeting:@Symp. I@"Integration of Novel Materials and Devices on Silicon for Future Technologies" (Warsaw, 2016)
- Int. Conf. on Silicon Epitaxy and Heterostructures (ICSI; 4th 2005, 5th 2007, 6th 2009, 7th 2011 (Co-chair), 8th 2013 (Chair))
- Int. Symp. on Control of Semiconductor Interfaces-for Next Generation ULSI Process Integrations-(ISCSI; 5th 2007, 6th 2013)
- Int. Symp. on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials (ISPlasmaC4th 2012, 5th 2013)
- Int. Conf. on Solid State Devices and Materials (SSDM; 1997 | 2012) 2011 (Vice-Chair), 2012 (Chair)
- Int. Conf. on Plasma Nanotechnology & Science (IC-PLANTS; 2008 | 2012)
- 24th Int. Conf. on Amorphous and Nanocrystalline Semiconductors (ICANS24, Nara, 2011)
- Int. SiGe Technology and Device Meeting (ISTDM, 4th 2008, 5th 2010, 6th 2012, 8th 2016)
- 1st Int. Workshop on Si based nano-electronics and -photonics (SINEP-09; Vigo, 2009)
- Int. Meeting for Future of Electron Devices, Kansai (IMFEDK; 2005 | 2010)
- European Mat. Res. Soc. Spring Meeting:@Symp. L@"Characterization of High-k Dielectric Materials" (Nice, 2006)
- Int. Workshop on Dielectric Thin Films (IWDTF; 1999, 2004, 2006) Vice-chair
- Silicon Nanoelectronics Workshop (SNW; 1999 | 2005)
- 4th Int. Symp. on Control of Semiconductor Interfaces (ISCSI-4; Tokyo, 2002)
- Int. Workshop on Gate Insulator (IWGI; 2001, 2003)
- 8th Int. Conf. on the Formation of Semiconductor Interface (ICFSI-8; Sapporo, 2001)
- Int. Conf. on Rapid Thermal Processing for Future Semiconductor Devices (RTP; Ise shima, 2001)
- 3rd. Int. Symp. on Surface Science for Micro- and Nano-Device Fablication (ISSS-3; Tokyo, 1999)
- Int. Joint Conf. on Si Epi. and Heterostructure (IJC-Si; Zao, 1999)
- Mat. Res. Soc. Spring Meeting: Symp. A "Amorphous and Polycrystalline Thin-Film Silicon Science and Technology" (San Fransicso, 1997, 1998)
‘Û‰ï‹cEƒVƒ“ƒ|ƒWƒEƒ€@ƒI[ƒKƒiƒCƒU
- 2022 Int. Conf. on Solid State Devices and Materials (SSDM 2023; Nagoya, Sept. 5-8, 2022) Organizing Committee Chair
- 2022 Int. Conf. on Solid State Devices and Materials (SSDM 2022; Makuhari Messe, Chiba, Sept. 26-29, 2022) Organizing Committee Vice-chair
- 8th Int. Symp. on Control of Semiconductor Interfaces (ISCSI-VIII; Sendai, Nov. 27-30, 2019) Organizing Committee Chair
- 11th Int. Symp. on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials/12th Int. Conf. on Plasma-Nano Technology (ISPlasma 2019/IC-PLANT 2019; Nagoya, March 17-21, 2019) Organizing Committee Chair
- 10th Anniversary Int. Symp. on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials/11th Int. Conf. on Plasma-Nano Technology (ISPlasma 2018/IC-PLANT 2018; Nagoya, March 4-8, 2018) Organizing Committee Vice-Chair
- 14th Int. Conf. on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-14,Sendai, Oct.21-15, 2018) Organizing Committee Chair
- 7th Int. Symp. on Control of Semiconductor Interfaces (ISCSI-VII; Nagoya, June 7-16, 2016) Organizing Committee Chair
- Symp. Z, "Material Science and Process Technologies for Advanced Nano-Electronic Devices" (Nagoya, Dec. 9-13, 2008) The IUMRS International Conference in Asia 2008 (IUMRS-ICA, 2008) Symp. Organizer
- Symp. "A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology" (San Francisco, April 9-13, 2007; 2008), Mat. Res. Soc. Spring Meeting, Symp. Organizer from Japan
- The Special Joint Symp. on "Evolution and Outlook of Oxide Nonvolatile Memories" (Tokyo, Dec. 11, 2005), Mat. Res. Soc. Japan, Symp. Organizer
‘Û‰ï‹cŽÀsˆÏˆõ
- 8th Int. Symp. on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials/9th Int. Conf. on Plasma-Nano Technology & Sicence (ISPlasma 2016/IC-PLANTS2016, Nagoya, 2016) Executive Committee Chair
- 2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2016, Hakodate, 2016) Steering Committee Co-chair
- Int. Symp on Dry Process Symp. (DPS: 2009 (Busan), 2010 (Tokyo), 2011 (Kyoto)) Steering Committee Vice-chair (2009, 2011) Chair (2010)
- 2008 Int. Workshop on Dielectric Thin Films (IWDTF-08CKawasaki, 2008)
- 7th Int. Conf. on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-7, Nara, 2003)
- 1998 Int. Conf. on Solid State Devices and Materials (SSDM 1998, Hiroshima, 1998)
- 5th Int. Symp. on Control of Semiconductor Interfaces-for Next Generation ULSI Process Integrations- (ISCSI-V, Tokyo, 2007) Vice-chair
‘Û‰ï‹c‘gD‰^‰cˆÏˆõ
- Int. Conf. on Solid State Devices and Materials (SSDM; 2014 `@) Vice-chair (2022), Chair (2023)
- Int. Symp. on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials/Int. Conf. on Plasma-Nano Technology & Science (ISPlasma/IC-PLANTS, 2014 `@) Vice-Chair (2018), Chair (2019)
- SiGe, Ge, & Related Compounds: Materials, Processing, and Devices Symposium in ECS (2008 (Hawaii), 2010 (Las Vegas), 2012 (Hawaii), 2014 (Cancun), 2016 (Honolulu), 2018 (Cancun), 2020 (Honolulu), 2022 (Atlanta))) Surfaces & Interfaces Committee Chair
- Int. Workshop on Dielectric Thin Films (IWDTF; 2011 (Tokyo), 2013 (Tokyo), 2015 (Tokyo), 2017 (Nara), 2019 (Tokyo), 2021 (Tokyo), 2023 (Kanazawa)) Chair (2011)
- Int. Symp. on Control of Semiconductor Interfaces(ISCSI; -V 2007 (Tokyo), -VI 2013 (Fukuoka), -VII 2016 (Nagoya), -VIII 2019 (Sendai)) Chair (2016, 2019)
- Int. Symp. on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials (ISPlasma; Nagoya, 2nd 2010, 3rd 2011, 4th 2012, 5th 2013)
- 15th Int. Conf. on Thin Films (ICTF-15; Kyoto, 2011) & Session Chair
- 24th Int. Conf. on Amorphous and Nanocrystalline Semiconductors (ICANS24; Nara, 2011) & Publication Chair: JNCS Guest Editor
‘Û‰ï‹cŽ–âˆÏˆõ
- Int. SiGe Technology and Device Meeting (ISTDM)/Int. Conf. on Silicon Epitaxy and Heterostructures (ICSI) (Joint ISTDM/ICSI Conf.; 1st 2018 (Potsdam), 2nd 2019 (Madison WI), 3rd 2023 (Como, Italy))
- 9th Int. Symp. on Control of Semiconductor Interfaces (ISCSI-IX; Nagoya, 2022)
- 8th IntDConfDon Reactive Plasmas (ICRP-8; Fukuoka, 2014)
- IntDConfDon Polycrystalline Semiconductors (POLYSE; Potsdam, 2004)
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- –¼ŒÃ‰®‘åŠw@‘åŠw‰@HŠwŒ¤‹†‰È@‹³–±ˆÏˆõ‰ï@•›ˆÏˆõ’· (2013/2014”N“x), ˆÏˆõ’· (2015/2016”N“x)
- –¼ŒÃ‰®‘åŠw@G30Ž©“®ŽÔHŠwƒvƒƒOƒ‰ƒ€@ƒvƒƒOƒ‰ƒ€ˆÏˆõ‰ï@•›ˆÏˆõ’· (2013.10 | 2014.9), ˆÏˆõ’· (2014.10 | 2015.9)
- –¼ŒÃ‰®‘åŠw@‘åŠw‰@HŠwŒ¤‹†‰È@“dŽqî•ñƒVƒXƒeƒ€êU@•›êU’· (2012”N“x)
- L“‡‘åŠw@HŠw•”@‘æ“ñ—Þ@•›—ÞŽå”C (2008”N“x)
- L“‡‘åŠw@HŠw•”@“üŽŽˆÏˆõ’· (2006”N“x)
- L“‡‘åŠw@HŠw•”@‘æ“ñ—Þ@—ÞŽå”C (2003”N“x)
- L“‡‘åŠw@‘̈ç‰ï@‘Ì‘€•”•”’· (1998.7 | 2010.5)