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Specifications

[Process chamber]
Laboratory made
Base pressure: 1 x 10^-7 Pa
Sample stage: X, Z, tilt, in-plane rotation

[ECR plasma source]
IRIE Koken RGB-114L
Microwave (2.45 GHz) power: 100 W
Acceleration voltage: 0 - 600 V
Available Gas: Ar, O₂
Beam size: 30 mm diameter

[Secondary ion mass spectroscopy, SIMS]
PFEIFFER EDP400
Mass range: 1 - 512 amu
Differential pumping system

[Helicon wave plasma source]
KATAGIRI Engineering CHW-20
Maximum RF power: 1kW
Available gas: Ar, O₂
Beam size: 20 mm diameter

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