Specifications
JEOL JBX-6300FS
Acceleration voltage: 50 kV / 100 kV
Emitter: ZrO/W field emitter
Beam diameter: 2 - 10 nm
Maximum sample size: 4 inch wafer, 4 inch mask
Specifications
JEOL JBX-6300FS
Acceleration voltage: 50 kV / 100 kV
Emitter: ZrO/W field emitter
Beam diameter: 2 - 10 nm
Maximum sample size: 4 inch wafer, 4 inch mask
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